Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)

Alcatel A100L

Asset ID: 209413

Print spec sheet

Alcatel

A100L

Dry Pump

Support Equipment (Fab)

Equipment details:

Date of Manufacture:

Currently Configured for: N/A

Current Equipment Status: Available

Location of Equipment: Taoyuan, Taiwan

Available date: Currently Available

Qty 6- Not overhaul (pump controller is not included)


AreaAsset descriptionoverhaulFixed Asset No.S/NLocationFAB
FSA100LN3C52AA060600AP2709727A18.5-8.5FAB C
FSA100LN 2308077A18.5-8.5FAB C
FSA100LN AP2802794A18.5-8.5FAB C
FSA100LN AP2607181A18.5-8.5FAB C
FSA100LN AP3104821A18.5-8.5FAB C
FSA100LN AP2209729A18.5-7.5FAB C





Feature

Rotation speed100 Hz / 6,000 rpm
Peak pumping speed95 m3/h / 1,583 l/min / 63 cfm
Ultimate pressure (w/out N2 purge)1.2 x 10-2 mbar / 9 mTorr
Max. continuous inlet pressure50 Torr
Supply voltage200 - 208 V 3-phase 50/60Hz
Max. continuous power (at max. pressure)2.5 kW
Power consumption at ultimate pressure1.8 kW
Average sound level at full speed55 dBA
Guaranteed sound level at full speed58 dBA
Ambient temperature15 - 50°C
Water flowmin. 100 l/h
Water temperaturemin. 10°C / max. 25°C
Gear box fluid capacity150 cm3 cc
Weight (w/out hand held display module)220.4 lbs / 100 kg
Inlet flangeDN 50 ISO-KF
Exhaust flangeDN 25 ISO-KF
Secondary exhaust portDN 25 ISO-KF
Interstage flangeDN 25 ISO-KF
Max. exhaust flow13 cfm
Vibration level at the enclosure baseplate sidehole (4 to 400 Hz Spectrum) 
    Acceleration< 0.1 G
    Displacement< 1.5 μm
    Speed< 1 mm/s


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