Macquarie Equipment Trading on behalf of Micron Technology Taiwan, Inc. (F11)

Applied Materials Centura AP eMax CT

Asset ID: 67403

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Applied Materials

Centura AP eMax CT

Dielectric Etch

Etch/Ash/Clean - Plasma Processing

Equipment details:

Date of Manufacture:

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan, Taiwan

Available date: 7/23/2021


Process: CUOX


Tool config is based on original PO, please verify tool details at tool inspection


STANDARD SPECIFICATIONS

Software Revision : VERSION 2.3_43

FI Software: B4.30_11

GEM SEC Revision: B7.10_21 

Wafer Size: Diameter 300+/- 0.05mm(SEMI M28), 775 +/- 25um, Notch

Carrier: FOUP (Comply with SEMI E47.1 (25wafers))

Load Port: 3 Loadport

Facility plate: N2 Regulator : Supplied by IMI in floor, CDA regulator 125 PSI onboard SMC pressure switch

Facility plate: Manual Valve : Supplied by IMI in floor

Facility plate: Pressure Gauge 

Loader Module Corrosion Prevention: TDK Corrosion Resistant

Loadlock Pressure Monitor: GAUGE CONVECTRON 1MTORR-1000TORR 1/4FVCR DNET, 3310-01187

Transfer Pressure monitor: GAUGE CONVECTRON 1MTORR-1000TORR 1/4FVCR DNET, 3310-01187

Transfer Pressure monitor: 5 SLM N2 MFC, software regulated, 3030-14249

Signal Tower: KIT, 4 LIGHT, DEVICENET LIGHT TOWER

EMO: Front x3, Rear x4

Cable Length: Monitor 1/2 cables : 15 ft/50ft  

Cable Length: Pump Cable : 75 ft

Monitor: Monitor-1 : Flat Panel with Keyboard on STAND 

Monitor: Monitor-2 : Remote Flat Panel on STAND 

IPUP: Alcatel IPUP


HARDWARE CONFIGURATION

Chamber type: CT- Qty 4


CHAMBER CONFIGURATION 

Process kits : Qt/Si 

Gas inject : 3.5 anodized SGD

chamber O-ring: chamraz513

Turbo pump: Dual Alcatel 1600

RF match: DAIHEN 

RF generator: ENI GHW 50

EPD windows: Quick remove released quartz

CM Test port: 1/2 VCR&KF25 Dual

RGA Port: RGA port W mech valve

Endpoint Type: H.O.T ENDPOINT

Endpoint Wavelength 1: CO 484 NM

Endpoint Wavelength 2: CN 387 NM

Cathode Temperature Monitor: YES

ESC Power Supply: CT HV POWER SUPPLY

RF Feed: DIRECT CT CATHODE

Dry pump: EABARA-ESR80WN

Wall chiller: SMC-H2010

Cathode chiller: SMC-INR 496-003D

Coolant: HT110

ESC type: ESC, ASSY, 300MM ,DUAL ELECTRODE,IA

Liner: CT LINER


PROCESS GAS BOX CONFIGURATION

Gas Name: MFC Type-Size

C4F6: FC-PN980CR1BA-150

CO: FC-PN980CR1BA-500

CH2F2: FC-PN980CR1BA-50

N2: FC-PN980CR1BA-200

O2_2000: FC-PN980CR1BA-2000

O2_200: FC-PN980CR1BA-200

CHF3: FC-PN980CR1BA-200

C4F8: FC-PN980CR1BA-50

CF4: FC-PN980CR1BA-300

AR: FC-DN780C-BA-300


Damage/Missing parts list

Please inspect tool to reconfirm

Dry pumps and customer provided items not included on sales

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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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