Macquarie Semiconductor and Technology on behalf of Micron Memory Japan, K.K. (F15)
Etch/Ash/Clean - Plasma Processing
Date of Manufacture: July 2011
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Hiroshima, Japan
Available date: Currently Available
| OEM | TEL | ||
| Tool Model | Tactras-Vigus | ||
| Process | Oxide | ||
| Software Version (include revision #) | Ver5.05-Rev502-STD-5.05a | ||
| System Power Rating | 200 AC3-Phase for System | ||
| Loading Configuration | 3 load port | ||
| Vendor Chm Model | Chemicals / Gases Used (not to use Micron Proprietary names) | ||||
| Chm/Unit Position 1 | Loder Module | - | |||
| Chm/Unit Position 2 | VTM | N2 | |||
| Chm/Unit Position 3 | Purge storage | ⁻ | |||
| Chm/Unit Position 4 | Process Module 1 (VIGUS) | C4F8,C4F6,CH2F2,COS,O2,CHF3,CF4,CO,N2,Ar,He | |||
| Chm/Unit Position 5 | Process Module 2 (VIGUS) | C4F8,C4F6,CH2F2,COS,O2,CHF3,CF4,CO,N2,Ar,He | |||
| Chm/Unit Position 6 | Process Module 3 (VIGUS) | C4F8,C4F6,CH2F2,COS,O2,CHF3,CF4,CO,N2,Ar,He | |||
| Chm/Unit Position 7 | Process Module 4 (VIGUS) | C4F8,C4F6,CH2F2,COS,O2,CHF3,CF4,CO,N2,Ar,He | |||
| Chm/Unit Position 8 | Process Module 5 (VIGUS) | C4F8,C4F6,CH2F2,COS,O2,CHF3,CF4,CO,N2,Ar,He | |||
| Chm/Unit Position 9 | Process Module 6 (VIGUS) | C4F8,C4F6,CH2F2,COS,O2,CHF3,CF4,CO,N2,Ar,He | |||
| Tool: | |||
| Process Unit: | Model: | ||
| Controller: | EC | ||
| MFC/Pressure Unit: | FCS Device-net I/F Type
(Fujikin) CM1：DNARETGAFKNV633 (MKS) CM2：DMA11TGAEKNN633 (MKS) | ||
| Drive Mechanisms: | Yasukawa LM：z軸、R軸、H1軸、H2軸、θ：ACｻｰﾎﾞﾓｰﾀｰ TM：y軸(ｽﾗｲﾀﾞ):ACｻｰﾎﾞﾓｰﾀｰ r軸,θ軸:DDﾓｰﾀｰ | ||
| FOUP Opener: | KWF-12C-T1(K-BL-601HAC1-SO-E) | ||
| Gas System: | 1.125 inch
Accumulation(CKD) 13 + 3(Edge-Add-Gas) | ||
| Exhuast System: | TMP（TMP-W3503LMC(T4)(VG250)(SHIMADZU)） TM/LLM PUMP：MU100U-147 (KASHIYAMA) |
Fab15 confirmed Six (6) bottom chillers are not included in tool for sale.
No missing parts.
Defective part: One (1) TM/LLM DRY PUMP.
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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