Macquarie Semiconductor and Technology on behalf of Micron Memory Japan, K.K. (F15)
Date of Manufacture:
Currently Configured for: To be determined
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Hiroshima, Japan
Available date: Currently Available
WET 15-3TEL_EXP_LAL_2201L3 TEL EXPEDIUS LAL
Defective parts: one LAL(1) CIRCULATOR .
Missing parts : FAb15 confirmed there were no missing parts.
No shipping kits have been installed on the tool.
Unit Diagram is Available.
| OEM | TEL | ||
| Tool Model | EXPEDIUS | ||
| Process | Acid washing | ||
| Software Version (include revision #) | 0323-0203 _ 2.2.0.7 | ||
| System Power Rating | 3Φ 200VAC Main、1Φ 200VAC UPS | ||
| Loading Configuration | 2 LP | ||
| Vendor Chm Model | Chemicals / Gases Used (not to use Micron Proprietary names) | |||||
| Chm/Unit Position 1 | LAL1 | LAL30 | ||||
| Chm/Unit Position 2 | OF1 | DI | ||||
| Chm/Unit Position 3 | LAL2 | LAL30 | ||||
| Chm/Unit Position 4 | OF2 | DI | ||||
| Chm/Unit Position 5 | SD2 | HF / IPA | ||||
| Main module LAL30 | 4 | |||||
| SD2 Module | 1 |
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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