JUSUNG Engineering Co., Ltd. Cyclone Plus

Equipment details:

Date of Manufacture: Jul 2015

Currently Configured for: 300mm

Current Equipment Status: Available

Location of Equipment: Gyeonggi-do,, Korea, Republic of

Available date: Currently Available

1. Transfer Module 

• Platform

-. Two Load Lock

-. Wafer Align Chamber -.Auto Door

-. 3 Load Port Module

- 6 Sided Transfer Chamber

-. Controller for TMC

• Cluster Tool Control 
• Main Power Box 
• Control Rack
• Auto Wafer Centering system

1. Semi-batch ALD Al203 Reaction Chamber 

• Process chamber 

-. Aluminum chamber (5 wfs loading) 

-. Wafer up/down Ass'y

-. Space Divided Plasma Kit

• Vacuum Ass'y
• Gas Jungle Box

-. In-situ cleaning

• New heating system
• Disk RPM Control
• Software & Controller
• Heat Exchanger control interface
• O3 generator control interface
• 2LDS System

1. Semi-batch ALD Al203 Reaction Chamber

• Process chamber 

-. Aluminum chamber (5 wfs loading) 

-. Wafer up/down Ass'y

-. Space Divided Plasma Kit

• Vacuum Ass'y
• Gas Jungle Box

-. In-situ cleaning

• New heating system
• Disk RPM Control
• Software & Controller
• Heat Exchanger control interface
• 2LDS System

1. Options & CES

• Swap Kit
• O3 Generator
• Auto refill system interface
• 2 * Source Canister (4L) 
• 2* Source Canister (3.2L) 
• Additional cost for increasing of 03 concentration
• Dry Pump FDC function
• 2* Powder Trap

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