Macquarie Semiconductor and Technology on behalf of Qorvo US, Inc.
Date of Manufacture:
Currently Configured for: 100mm
Current Equipment Status: Available
Location of Equipment: Farmers Branch, United States
Available date: Currently Available
LFE Plasma Systems APE-110
Q'ty : 2
Controller: Intel 8052 microprocessor
Digital mass flow control
Digital metering for RF power and chamber pressure
Process Gas: Delivered at 5 psig, 35 kpa
Flow Rate: 1/2 1500 sccm max
Frequency: 13.56 mHz
System electrical: 115VAC, 50/60Hz, 15A
Pump requirements: 23cfm (not included)
Compressed Air: 65-85 psig, 450-858 kpa.
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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