Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)

Novellus Systems Inc. Concept Three Altus


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Asset ID: 79212

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Novellus Systems Inc.

Concept Three Altus

WCVD (Chemical Vapor Deposition)

Deposition Equipment

Equipment details:

Date of Manufacture: 2004-01-01

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan, Taiwan

Available date: Currently Available

Tool config is based on original PO, please verify tool details at tool inspection

Tool Model: C3-SCON

System Power Rating: 208 AC 3-Phase

Loading Configuration: 3 load ports

Chamber lift pin Servo moter assembly Qty 2- Retrofit to servo moter from Pneumatic

Process Unit:4200-61 VIA W DEP

Chm/Unit Position 1: C3 ALTUS CHA; Chemicals / Gases Used: Ar/SiH4/H2/WF6/NF3/B2H6/N2

Chm/Unit Position 2: C3 ALTUS CHB; Chemicals / Gases Used: Ar/SiH4/H2/WF6/NF3/B2H6/N2

Basic System 

Platform type: C3 WTS MC3

Chamber type: C3 ALTUS

Loadport count: 3

Required Software Revisions

System software (Proteus): 2.657_151

System software (QNX): 5.86B150

WTS IOC0 firmware: SIOC 4.8

WTS IOC1 firmware: SIOC 4.8

WTS IOC E84/AWC firmware: NA

Altus IOC0 & IOC1 firmware: 02-274618-00 SIOC 4.8

Altus IOC2 firmware: 02-274618-00 SIOC 4.8

Windows version: Windows 2000

ATM robot firmware: WAVE2, 1.0T,CF2AB

Throttle valve controller firmware: NA

Supporting Remote Units

Transfer module pump: IH600

Loadlock pump: IH600

Hardware Configuration - Frame

Module controller: ASSY,CONTROLLER,MC4,ETHERNET, 02-423402-00

Platform controller: ASSY,CONTROLLER,MC4,ETHERNET, 02-423402-00

WTS IOC0: PCA,FIELD,WTS-3F,SIOC0, 03-157052-00



Altus IOC0 & IOC1: ASSY,PCA,FLD CONN,SIOC 0&1,300, 02-057949-00

Altus IOC2: ASSY,PCA,FLD CONN,SIOC2,300WCV, 02-109139-00

ATM robot kit: 63-283529-00

ATM robot end effector: 02-270536-01

Transfer module robot: 02-262511-00

Transfer module SMC valve: 60-251903-00

Cooling pedestals, LL-R: 02-164380-01 Right

Cooling pedestals, LL-L: 02-164380-02 Left

Throttle valve, WTS: 02-101445-00

LL ATM gate valve: 02-259468-00

LL vacuum gate valve: 60-052581-00

Leak check shutoff valve: 04-110786-00

Mini-environment AWC: Installed

TM AWC sensor transmitter: 27-053299-00

TM AWC sensor receiver: 27-053301-00

IMM-ready hardware: NA

Loadlock baratron: 27-126439-00

Transfer module baratron: 27-10340-00

Transfer module pump: IH600

Loadlock pump: IH600

He elimination loadlock: NA

FFU filter: PB-500 FFU Grade for HF (Novellus) Size, 002346-0002, 22-S4C22-1

FFU filter lifetime, chemicals of interest, limit: 3 months, NOX, < 6 ppb

Hardware Configuration - Chamber 

Station 1 pedestal: 16-341152-00

Station 1 MOER: 15-105508-00

Station 1 showerhead: 16-289070-00

Station 2 pedestal: 16-341152-00

Station 2 MOER: 15-105508-00

Station 2 showerhead: 16-289070-00

Station 3 pedestal: 16-341152-00

Station 3 MOER: 15-105508-00

Station 3 showerhead: 16-289070-00

Station 4 pedestal: 16-341152-00

Station 4 MOER: 15-105508-00

Station 4 showerhead: 16-289070-00

Remote plasma clean: 27-261291-00

Indexer plate hub: 15-100082-00

Indexer plate upper assembly: 15-046309-00

Spindle assembly: 02-324753-00

IR endpoint detector kit: 34-348116-00

Leak check shutoff valve: 60-268274-00

Assembly, carrier ring holder (reduced tip wafer holder): 02-332440-00

Throttle valve PCV: 60-174047-00

TV controller/firmware: 27-146103-00

Gate valve, L-motion SMC: 60-313773-00

Symmetric foreline: 04-363404-00

Process 100T manometer: 27-10340-00

Process 10T manometer: 27-10343-00

Backside 100T manometer: 27-10340-00

SiH4/B2H6 canopy filter: 22-00006-00

Aligner: NA

UPC: 02-162343-00

Station 1 springs: 15-355501-00

Gas Panel (part#, gas species, size): 

Line 1, manifold D: AERA FC-D980, Ar, 5SLM

Line 2, manifold D: Aera FC-D980C-SiH4 / 500 SCCM

Line 3, manifold A: AERA FC-D980,H2, 30slm

Line 4, manifold A: AERA FC-D980, Ar, 20slm

Line 5, manifold W: Aera FC-D980C-WF6 / 500 SCCM

Line 6: na

Line 7: 

Line 8, manifold C: AERA FC-D980, Ar, 20SLM

Line 9, manifold C: AERA FC-D980, H2, 30SLM

Line A: NA

Line B, manifold A: NA

Line C, Ar carrier: AERA FC-D980, Ar, 20SLM

Line D, manifold H: AERA FC-D980, Ar, 50SLM

Line E, manifold J: Aera FC-D980C-WF6 / 500 SCCM

Line F, manifold K: AERA FC-D980, Ar, 5SLM

Line G, manifold K: Aera FC-D980C-SiH4 / 500 SCCM

Line H: NA

Line I, manifold A: AERA FC-D980, NF3, 5SLM

Line J, manifold M: Aera FC-D980C-WF6 / 500 SCCM

Line K, manifold N: Aera FC-D980C-WF6 / 500 SCCM

Line L: NA

Line M, Ar carrier: AERA FC-D980, Ar, 20SLM

Line N, manifold D: AERA PA7800, B2H6, 750SCCM

Line P, manifold F: AERA FC-D980, Ar, 20SLM

Line X, manifold K: NA

Damage/Missing parts list

Please inspect tool to reconfirm

Pumps and customer provided items not included on sales

Product images

The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.

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