Macquarie Equipment Trading on behalf of Micron Technology Taiwan, Inc. (F11)

Kokusai Electric Co., Ltd Quixace II Nitride

Asset ID: 84905

Print spec sheet

Kokusai Electric Co., Ltd

Quixace II Nitride

Vertical Furnace

Furnaces/Diffusion Systems

Equipment details:

Date of Manufacture:

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan City, Taiwan

Available date: Currently Available

Process: NITR


Tool config is based on original PO, please verify tool details at tool inspection


Furnace Unit      

Cartridge Heater:D4EX30445-RHC-2 

T/C for Heater Control:D4EX15442   

T/C for Sub Heater Control:D4EX30655   

T/C for Over temperature Protection:D4EX15442   

5-P T/C for Cascade Control:D4EX22994-L Type

5-P T/C for Profile Control:OPTION

1-P T/C for Profile Control:D4EX21001-OPTION 


Clean Unit      

Clean Module Unit:BV-R14TF2G1H-Wafer transfer area(Transfer)

Clean Module Unit:BV-R09TF2G1L-Wafer transfer area(Loading Area)

Clean Module Unit:PCF-8EKD3796-Rotation FOUP Storage(Lower)


Controller      

Main Controller(OU):D4EX35757(CX5000)   

Main Operation Unit:TM150-HKT02   

Sub Operation Unit:KDSC-2005SUBDISP   

Process Module Controller:D4EX43195(PMC5000)   

DDC Temperature Controller:D4EX36151(CQ1720)-CPU +TC Unit

Gate Drive Unit:D4EX36969(DN-150VR-T5)   

MFC / Pressure Unit:D4EX36215(MFCDNET2)-DeviceNet Remote

FOUP Loader Controller Unit:D4EX36773(Robo5000)-Main Unit

Wafer Handling Controller Unit:D4EX36758(Robo5000)-Sub Unit

Valve / Interlock Control Unit   CJ1G-CPU43H-Made by Omron

Switching HUB:FL SWITCH SFN 8TX   

Signal Tower (Front):LME-402W-RBYG,Red, Blue, Yellow, Green

Signal Tower (Rear)

Signal Tower (Pump)

Gas Flow Pattern Panel:D7EX40367

EDA Controller:D4EX38401 (EDA)

EDA Operation Unit:TM150-HKT02


Drive Mechanisms   

I/O Shutter   

AGV/PGV/OHT Stage   

FOUP Loader   

Rotation FOUP Storage: FOUP receipt number : 16

FOUP Opener:2 Ports

Wafer Detection:25 in one lot.

Wafer Transfer:Lift Transfer

Variable Wafer Pitch Converter   

Boat Elevator   

Boat Changer   

Furnace Port Shutter   

Boat Rotation   

Broken Wafer Detector:OPTION

Wafer Transfer Crash Detector:OPTION

Tweezer Pitch check mechanism:OPTION


Gas System   

Gas Unit(IGS):SiH2Cl2, NH3, NF3

Tape Heater for gas pipe:SiH2Cl2 Line


Exhaust System      

Dry Pump& Mechanical Booster Pump:IH1800-HTX-Made by EDWARDS/Prepared By

User

Diaphragm Sensor (1000Torr):631C13T8FH,Made by MKS

Diaphragm Sensor (2Torr):631C02T8FH,Made by MKS

Diaphragm Sensor (10Torr):722B11TCE2FA,Made by MKS

ATM SENSOR:"PA830 102G(SENSOR)

, PZ200(DISPLAY)"-"Made by COPAL

Main Valve:VEC-R-V80B0W2-400H,Made by CKD

Exhaust Piping

Exhaust Dilution Line

Reactor Tube Press Leak Line

Back Ground Line:SiH2Cl2, NH3, NF3

Jacket Heater for exhaust pipe:D4EX32782,Made by MKS

Seal Cap Heater   :SH-13049-02,Made by SHINWA VANES

Inlet Flange heater:D7EF78958,Made by TOKYO GIKEN

Inlet Port heater:ESH-12965-02, 

ESH-12966-01,Made by SHINWA VANES

Cold Trap


Safety      

Light Curtain System:SL-C52H, Made by KEYENCE

Gas Detector (NH3 Indicator/Detector):GD-K71D-R(NH3/75PPM), Made by Riken Keiki

Gas Detector (NF3 Indicator/Detector):GD-K77DG(NF3/30PPM), Made by Riken Keiki

Gas Detector

(SIH2CL2 Indicator/Detector): GD-K71D-R

(SIH2CL2/15PPM), Made by Riken Keiki


Other      

AGV I/F UNIT: OPTION

OHT I/F UNIT:DMS-HB1-Z, Made by HOKUYO

CIDRW CONTROLLER: V700-L22-5,Made by OMRON

AMPLIFIER UNIT: V640-HAM12, Made by OMRON

CIDRW HEAD: V640-HS62,Made by OMRON

CHEMICAL FILTER-Made by TOAMEC


N2 Purge Load Lock System      

O2 Monitor / Detector:TF-21D201(RX-105063-A),Made by Energy Support

FOUP Opener N2 Purge SYSTEM, Made by Hitachi Kokusai

Loading Area MFC:HM5143B20AR, Made by Tokyo Keiso

Loading Area N2 Purge Line- Made by Hitachi Kokusai

FOUP Opener N2 Purge Line- Made by Hitachi Kokusai



Missing/Damaged Parts List:

None report, please inspect tool to reconfirm

Enquire about this product

I agree to receive further communication from Macquarie Group Limited in accordance with its Privacy Policy, as amended from time to time.

Product Images

The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


Related products

No results message:
Displayed when filters returns no results.

We couldn't find any items that match your criteria.

Please try a different keyword.

Service unavailable:
Displayed when filter service cannot be reached.

Sorry, this service is currently unavailable.

Please try again later.

Get in touch

Have a question for our team?

Ask about our equipment solutions, ranging from Macquarie equipment inventory sales, sourcing programs, surplus disposition options, and direct equipment purchases.

I agree to receive further communication from Macquarie Group Limited in accordance with its Privacy Policy, as amended from time to time.