Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)

Tokyo Electron Ltd. (TEL) ALPHA-303i Anneal

Asset ID: 207757

Print spec sheet

Tokyo Electron Ltd. (TEL)

ALPHA-303i Anneal

Vertical Furnace

Furnaces/Diffusion Systems

Equipment details:

Date of Manufacture:

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan City, Taiwan

Available date: Currently Available

DIFFUSION 11-3TEL_A303I_CURE_01 TEL 303I CURE


Process: copper


Tool config is based on original PO, please verify tool details at tool inspection


System, General Specification

Safety Specification: SEMI S2-0706/CE

Heater Model: FTP VOS-56-101 4zone/RT-1100(C)/with RCU

Process Condition: AP

Process Temperature (C): 320C

ART Control: None

N2 Load Lock: Yes

Wafer Type: 300mm-Si SEMI STD-Notch

Qty. of Production Wafers: 141Wafers

Side Maintenance: Yes

Software Version : Ver 2.13 (WAVES)

Boat Operation: 2 Boat Type

Temperature Controller: Furnace Temperature Controller, Model 560A Phase


System, User Interface

Signal Tower Model: LOUGWB-24-4

Signal Tower Colors: Signal Tower Colors (from the Top), Red/Yellow/Green/Blue

Signal Tower Location: Front Operation Panel

Front Operation Panel: Yes

MMI and Gas FlowChart: Gas Box & Front Operation Panel Installed

Indicator Type: Superset

Operator SW: Operator Access/Orange (STD)

Pressure Display Unit: MPa / Torr

Cabinet Exh Pressure Display: Cabinet Exhaust Pressure Display Unit=Pa

Warning Label: English


System, Furnace

Dewpoint Meter for N2 LL: None

Loading Area Light: White (Fluorescent Lamp)

RCU Duct Length FNC - RCU: 20m

Ionizer (maker/model): Yes

Chemical PreFilter-Acid: Chemical Pre-filter (for Acid)=None

Chemical PreFilter-Alkali: Chemical Pre-filter (for Alkali)=None

Chemical PreFilter-Hydrocarb: Chemical Pre-filter (for Hydrocarbon)=None

Chemical PreFilter-Location: Chemical Pre-filter Location=N/A

Side FFU Chemical Filter: Side FFU Chemical Filter=None

O2 Control for N2 LL: O2 Density control for N2 Load Lock=Yes


System, Wafer/Carrier Handling

Carrier Type: FOUP/25slots, SEMI STD

FOUP Maker/Model: FOUP Maker/Model= Entegris/F300-2005-17UT1502

Carrier Stage Capacity: 16 FOUP

Info Pad A,B: None

Fork Material: Al2O3+PEEK

W/T Type: KAWASAKI(1+4 Edge Grip)

W/T Type A/T: None


System, Power Distribution

Voltage 3phase: 480VAC

3phase connection type: Star Connection

Voltage Single-phase: 120VAC

Single-phase connection type: N/A

Frequency: 60Hz

Wattmeter: None

Control Power UPS provided by: Customer

Control Power UPS type: N/A

UPS Input/Output Voltage: N/A


System, Gas Distribution

IGS Type: Integrated Gas System

IGS Maker: Fujikin

Tubing Bends: Bend Less than 90deg

IGS Final Filter: PALL

IGS Regulator: CKD

IGS MFC: Horiba STEC / Digital

IGS Press. Transducer: NAGANO

Liquid Source Vapor System: Liquid Source Vapor System Maker/Type=None

Auto-Refill System: Auto-Refill System Maker/Model=N/A

Auto-Refill System Provider: Auto-Refill System Provided By=N/A

Refill System Tubing: Refill System Tubing Interconnect By=N/A

Ozone Delivery System: Ozone Delivery System Maker/Model=None (STD)

Ozone Delivery System Prov: Ozone Delivery System Provider=N/A

Water Vapor Generator(WVG): Installed= 2L, Type (O2 Rich)

Vacuum Gage - Press Ctrl: CKD-VEC

Vacuum Gage - Press Monitor: TEMTECH

Vacuum Gage - Pump Monitor: INFICON

Main Valve: CKD-VEC

Pump Maker/Model: N/A

Pump Provided by: Customer

N2 Dilution Unit Provided by: Customer

Pump Power: Customers Facility Provided

Pump Control Unit Location: Pump Control Unit Setting Location=Power Box Top

Vacuum Piping Provider: Pump-FNC Vacuum Piping Provided By=Customer

Gas Leak Detector: None

Gas Leak Detector Provided By: Customer

Gas Leak Detector Maker: Customer - House System

Gas Detector Power: Customers Facility Provided

Detected Gas 1 / Location: N/A

Detected Gas 2 / Location: N/A

Detected Gas 3 / Location: N/A

Detected Gas 4 / Location: N/A

Detected Gas 5 / Location: N/A

Detected Gas 6 / Location: N/A

Detected Gas 7 / Location: N/A

External Torch Unit: Std Flow Torchwithout Dilution

Burn Out Unit: None

PAC: None

Exhaust Pressure Control: AbsolutePressure Control

Exhaust Pressure Controller: CKD

Condenser: Yes

Vacuum Exhaust System: N/A

Trap: N/A

Vacuum Pressure Controller: N/A

Heater Tape Interface: Heater Tape Interface


System, Reactor

Quartz Provided by: TEL

Quartz Vendor Requirement: None

SiC Provided by: TEL

SiC Vendor Requirement: None

Liner Tube (AP): Yes(CVD coated SiC)

Process Tube (AP, AP+Sub-AP): Quartz Single

Outer/Inner Tube Material: N/A

Inner Tube Type (LP): N/A

Inner T/C: Process Tube interior wall type (for FTP)

Tube Sealing: N2 purge + O-ring Seal

Manifold Heater: N/A

Valve,Manifold PCW: N/A

Soft Backfill Injector: N/A

Boat Type: 141 slots Ladder (6.3 mm Pitch)

Boat Material: Quartz with sand blast

Boat Rotation: Yes

Pedestal Type: Quartz

Cap Heater: None

Auto Shutter: No Storage Purge Type

Earthquake Countermeasure: None

Process Cap: Process Cap


System, Facilities

Exhaust Connection Point: Top Connection

PCW Connection Point: Bottom Connection

Incoming Gas Connection Point: Bottom Connection

Gas VENT Connection Point: Bottom Connection

Exhaust VENT Connection Point: Bottom Connection

Gas Unit Exh Connection Point: Bottom Connection

Power Cable Input Location: Power Box Top

Gas Exhaust Connection Point: Bottom Connection

RCU DUCT Connection Point: Exhaust Box Rear


System, Cable Length

FNC - Power Box: 20m

Power Box - RCU: 20m

Power Box - Pump Unit: N/A

Power Box -Refill System: N/A

Power Box - WVG CTRL Unit: N/A

FNC - WVG CTRL Unit: N/A

Power Box -Scrubber System: N/A

Wiring by: Customer

Conduit/Raceways provided by: Customer


Damage/Missing parts list

Please inspect tool to reconfirm

Dry pumps and customer provided items not included on sales

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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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