Macquarie Semiconductor and Technology on behalf of Micron Memory Japan, K.K. (F15)

Tokyo Electron Ltd. (TEL) TELFORMULA ALD High-K

Asset ID: 204420

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Tokyo Electron Ltd. (TEL)

TELFORMULA ALD High-K

Vertical Furnace

Furnaces/Diffusion Systems

Equipment details:

Date of Manufacture: May 2007

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Hiroshima, Japan

Available date: Currently Available

A Gas Box will be detached from the main body unit for de-installation and equipment move out and will stay with the main body unit in the warehouse.


Signal wires have been cut, which were used to connect to the main body unit of tool.

Main body unit has not been split into 3 to 4 pcs in order of equipment de-installation.

(The tool is divided into four parts in the shape of Exhaust box, Gas box, Furnace unit, and Front unit in order to secure the loading and unloading routes.)


Missing parts: Please see below.

DescriptionMissing (Qty)
PCB,CPU..E2B105-13 MCF BRD1
PCB,I/F..E2B023-11 ECU BRD1
POWER SUPPLY,DC..E2U008-11 PWR 1
PCB,CPU..SC2410-16E05T  1
Power Box1
RCU Unit1
Equip Water cooling Unit1
Ozonizer1


OEM  TEL
Tool Model  FORMULA
Process  ALDALZROX
Sending Site Workstation Name  F15
Software Version (include revision #) Ver 2.12
System Power Rating  400VAC 3-Phase for system
Loading Configuration  2 load positions for furnace or dual auto-indexer loaders


UPDATED CONFIGURATION AVAILABLE: PLEASE CONTACCT YOUR SALES PERSON.

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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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