Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)

Tokyo Electron Ltd. (TEL) TELINDY Plus ALD HighK

Asset ID: 19907

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Tokyo Electron Ltd. (TEL)

TELINDY Plus ALD HighK

Vertical Furnace

Furnaces/Diffusion Systems

Equipment details:

Date of Manufacture: 2010

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan City, Taiwan

Available date: Currently Available

DIFFUSION 11-3TEL_INDY_ALDOX_01HT TEL INDYPLS ALDZROX


Tool config is based on original PO, please verify tool details at tool inspection


General Specification

Safety Specification:S2-0706/CE

Heater Model: Low-Temp VMM-56-201 4zone/150-600C without RCU

Process Condition: LP

Process Temperature (C):300C

ART Control:None

N2 Load Lock:Yes

Wafer Type: 300mm-Si SEMI STD-Notch

Qty. of Production Wafers: 100wfr

Boat Operation: 2 Boat Type / 2 Boat Operation (B/S)

Software Version (WAVES): Ver. 6.07


Furnace Spec, Furnace

Dewpoint Meter for N2 LL: None

Loading Area Light: White (LED)

RCU Duct Length FNC - RCU: None

Ionizer (maker/model): None

Chemical PreFilter-Acid:None

Chemical PreFilter-Alkali: None

Chemical PreFilter-Hydrocarb: Yes

Chemical PreFilter-Location: Side FFU

Side Maintenance: None

O2 Density Control for N2 LL: Yes

O2 ANALYZER Maker: NGK, Model: SH-304 STANDARD

N2 Boat Shower Wafer Cooling: Yes

Furnace Temperature Controller: Model 560A


Furnace Spec, Wafer/Carrier Handling

Carrier Type: FOUP/25slots, SEMI STD

FOUP Maker/Model: Entegris/Spectra

Carrier Stage Capacity: 18 FOUP

Info Pad A,B: Pin

Info Pad C,D: Pin

Fork Material: Al2O3+PEEK

W/T Type: 1+4 Edge Grip

W/T Type A/T: None


Furnace Spec, Furnace Facilities

Furnace Exhaust Connection Poi: Top Connection

Cooling Water Connection Point:Bottom Connection

RCU DUCT Connection Point:N/A


Gas Spec, Gas Distribution System

IGS Type: IGS 1.125"W-seal rail-mount

IGS Maker:Fujikin

Tubing Bends:Bend (Less than 90deg)

IGS Final Filter:PALL

IGS Regulator: CKD

IGS MFC (Maker/Type):AE / Digital

Water Vapor Generator(WVG):N/A

IGS Press. Transducer: NAGANO

Liquid Source Delivery- 3DMASi: AS-102S-B5/3DMASi 300sccm MCAC./ADVANCED ENERGY

Auto Refill System- 3DMASi:Customer Provided - Bulk 3DMASi delivery system CG325/CG400 GEN II or CG325 GEN II Scumacher-Chemguard

Auto Refill System Provider: Provided by customer

Refill System Tubing interconn: Provided by customer

Ozone Delivery System (Maker/M:"Maker: MKS

Model: AX 8575-29"

Ozone Delivery System: Provider customer 0

Liquid Source Delivery- Zr:Onboard Zr bubbler, ergonomic version

Liquid Source Delivery- X precursor: Onboard Ti bubbler, ergonomic version

Liquid Source Delivery- TMA: Onboard TMA bubbler, ergonomic version

HTR9.1,FLAT,AMPOULE,0DP0: Insulation, Ampoule, Top/9399-0975/MKS

HTR,INS,NBV,MAN KNOB:Insulation, Valve Knob,9599-0665/MKS

HTR2.5,STR6.21,SPEC,1EP0:Insulation, bypass,9525-0060/MKS

HTR2.0,STR5.5,SPEC,1EP0:Insulation, outlet,9520-0839/MKS

HTR2.0,STR5.5,SPEC,1EP0:Insulation, inlet,9520-0840/MKS

Wrap around valve heater (MKS):Valves heated by wrap around heaters supplied by Supplier


Exhaust Specificationbution

Vacuum Gage - Press Ctrl: MKS (Hot) Capacitance Manometer

Vacuum Gage - Press Monitor (1: MKS (Hot) Capacitance Manometer

Vacuum Gage - Pump Monitor:MKS (Hot) Capacitance Manometer

Main Valve: CKD-Hi-Speed VEC

Pump Maker/Model: EDWARDS/IXH1820, OPT: Pump is customer Provided. Ordering Fab must verify pump is purchased for all process chambers.

Pump Provided by: Provided by customer

Abatement System Type: Burning Type Abatement maybe different based on Fab specification.

Abatement System (Maker/Model): Orient service Co.,Ltd / GDO1862-WA Abatement maybe different based on Fab specification.

Abatement System Provider: Customer

N2 Dilution Unit Provided by: Customer

Pump Power: Customer

Pump Control Unit Setting Loca: Power Box Top

Pump-FNC Vacuum Piping Provide: Customer


Reactor Specification

Quartz Provided by: Optional

Quartz Vendor Requirement: Must be Customer qualified supplier

SiC Provided by:N/A

SiC Vendor Requirement: N/A

Liner Tube (AP):N/A

Process Tube (AP, AP+Sub-AP):N/A

Outer/Inner Tube Material: Quartz / Quartz

Inner Tube Type (LP): Cross-flow inner tube Type with narrow slit and wider pitch tab is used (slit size 1007 mm)

Inner T/C: Outer Tube interior wall type (for CVD)

Tube Sealing: O-Ring

Manifold Heater: Yes

Switch Valve for Manifold Cool: Yes

Soft Backfill Injector: Yes

Boat Type: 117 slots Ladder (8mm pitch)

Boat Material: Quartz

Boat Rotation: Yes

Pedestal Type: Quartz

Cap Heater:Yes

Auto Shutter: No Shutter Purge Type

Earthquake Countermeasure: Yes,OPT: Ordering Fab must verify seismic requirements and note any special requirements within the PO.



Power Specification, Power dist System

Voltage 3phase: 480VAC

3phase connection type: Star Connection

Voltage Single-phase: 120VAC

Single-phase connection type: Grounded

Frequency: 60Hz 

Wattmeter: None

Control Power UPS provided by: Optional

Control Power UPS type: Fab-wide system

UPS Input/Output Voltage:N/A


Power Specification, Cable Length

Power Cable Input Entrance Loc: Power Box Top

FNC - Power Box:20m

Power Box - RCU: N/A

Power Box - Pump Unit:20m

Power Box -Refill System (if u: 20m

Power Box - WVG CTRL Unit (if: N/A

FNC - WVG CTRL Unit (if used): N/A

Power Box -Scrubber System (if: N/A

Power Box - Ozone Delivery sys: 30m

Power Box - UPS (if used):N/A

Wiring by: Customer

Conduit/Raceways provided by:Customer


Interface Specification, Factory Automation System

Host Communications: Comply with GJG

Equipment Host I/F Connection:Gas Box TOP HSMS (10Base-T/100Base-TX), OPT: Ordering Fab to verify connection point as follows: QTY=1 is Bottom connection, QTY=2 is Top connection, Default = 1, and note any special requirements within the PO.

Ingenio:Yes, OPT: Ordering Fab must specify Ingenio included or not, default is Yes (QTY=1). Set QTY=0 if excluded

Group Controller Connection: Yes

OHT Capability: Yes

AGV Capability: None

RGV Capability: None

PGV Capability: None

Load Port Operation: Upper

PIO I/F Location: FNC Top

PIO Provided by:TEL

PIO Maker/Model: HOKUYO / DMS-HB1-Z series(Head-On)

Carrier ID Reader Writer Type: RF

CIDRW Lower Load Port: Read

CIDRW Upper Load Port: Read

CIDRW FIMS: Read/ Write,OPT: Ordering Fab must verify if Write or Read Write. Write only QTY= 1.Read/Write QTY= 2. Default = 1 . Note any special requirements within the PO.

CIDRW Maker/Model:"Controller is V700-L22-6.

ID READER(HEAD) is V640-HAM11-V2.

ANTENNA is V640-HS61."

CIDRW Provided by: TEL

EEC (Equipment Engineering Cap: FDC(Fault Detection and Classification) "OPT: Ordering Fab must specify if FDC is included or not, Include = QTY=1, Set QTY= 0 if excluded.

Default = 1"

Customized Management Signals: PT / WATER

"INTERFACE PT/WATER: Interface A Option "OPT: Ordering Fab must specify Interface A included or not, Include = QTY=1, Set QTY= 0 if excluded.

Default = 0"


Interface Specification, User Interface

Signal Tower Model: LOUGWB-24-4,OPT: Ordering Fab to verify VAC signal tower as follows: QTY=1 is LOUGWB-24-4, QTY=2 is LOUGWB-24-3, Defualt = 1 and note any special requirements within the PO.

Signal Tower Colors: Red/Yellow/Green/Blue, OPT: Ordering Fab to verify signal tower as follows: QTY=1 is Red/Yellow/Green/Blue , QTY=2 is Red/Yellow/Green, Defualt = 1 and note any special requirements within the PO.

Signal Tower Location: Front

Front Operation Panel: Yes

MMI and Gas FlowChart: Gas Box & Front Operation Panel Installed

Indicator Type: Superset

Operator Switch: Operator Access/Orange (STD)

Pressure Display Unit: MPa / Torr

Cabinet Exh Pressure Display: Pa

Warning Label: English


Other Specification, Unit Location

Furnace (Exh/Box,Gas/Box inclu:Main-Fab

Power Box:Sub-Fab

Pump:Sub-Fab

RCU:N/A

Step Up Transformer:N/A

Step Down Transformer:N/A

Ozone Delivery System:Sub-Fab

WVG Controller:N/A

Auto-Refill System:Sub-Fab

UPS:None


Other Specification, Gas Leak Detector

Condenser:N/A

Gas Leak Detector:YES

Gas Leak Detector Provided By:TEL

Gas Leak Detector Maker:RiKen / GD-K77D-A

Gas Detector Power:Power is provided by Machine

Detected Gas 1 / Location:Optional

Detected Gas 2 / Location:N/A

Detected Gas 3 / Location:N/A

Detected Gas 4 / Location:N/A

Detected Gas 5 / Location:N/A

Detected Gas 6 / Location:N/A

Detected Gas 7 / Location:N/A

Furnace Detection Port:4 points (2 pairs)

Gas Box Detection Port:4 points (2 pairs)


Damage/Missing parts list

Please inspect tool to reconfirm

Dry pumps and customer provided items not included on sales

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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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