Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)
Date of Manufacture:
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Taoyuan, Taiwan
Available date: Currently Available
Process: ALDSIOX
Tool config is based on original PO, please verify tool details at tool inspection
Furnace Unit
Cartridge Heater:D4EX22250, RHC2 Heater
T/C for Heater Control:D4EX15442
T/C for Sub Heater Control
T/C for Over temperature Protection:D4EX15442
5-P T/C for Cascade Control:D4EX29950,L type(5P)
5-P T/C for Profile Control:OPTION
1-P T/C for Profile Control:D4EX21001,OPTION
Thyristor Unit for Control:SKKT160L5Z4F-HKD,Air cooling type
Clean Unit
Clean Module Unit:BV-R14TF2G1H-Wafer transfer area(Transfer)
Clean Module Unit:BV-R09TF2G1L-Wafer transfer area(Loading Area)
Clean Module Unit:PCF-8EKD3796-Rotation FOUP Storage(Lower)
Controller
Main Controller（OU）:D4EX35757(CX5000)
Main Operation Unit:TM150-HKT02
Sub Operation Unit:D4EX35758 (KDSC-2005SUBDISP)
Process Module Controller:D4EX43195(PMC5000)
DDC Temperature Controller:D4EX36151(CQ1720)-CPU +TC Unit
Gate Drive Unit:D4EX36969(DN-150VR-T5)
MFC / Pressure Unit:D4EX36215(MFCDNET2)-DeviceNet Remote
FOUP Loader Controller Unit:D4EX36773(Robo5000)-Main Unit
Wafer Handling Controller Unit:D4EX36758(Robo5000)-Sub Unit
Valve / Interlock Control Unit CJ1G-CPU43H-Made by Omron
Switching HUB:FL SWITCH SFN 8TX
Signal Tower (Front):LME-402W-RBYG,Red, Blue, Yellow, Green
Signal Tower (Rear)
Signal Tower (Pump)
Gas Flow Pattern Panel:D7EX40367
EDA Controller:D4EX38401 (EDA)
EDA Operation Unit:TM150-HKT02
Drive Mechanisms
I/O Shutter
AGV/PGV/OHT Stage
FOUP Loader
Rotation FOUP Storage: FOUP receipt number : 16
FOUP Opener:2 Ports
Wafer Detection:25 in one lot.
Wafer Transfer:Lift Transfer
Variable Wafer Pitch Converter
Boat Elevator
Boat Changer
Furnace Port Shutter
Boat Rotation
Broken Wafer Detector:OPTION
Wafer Transfer Crash Detector:OPTION
Tweezer Pitch check mechanism:OPTION
Gas System
Gas Unit(IGS):N2, NF3
Tape Heater for gas pipe
Exhaust System
Dry Pump& Mechanical Booster Pump:IH3030T, Made by EDWARDS/Prepared By User
Diaphragm Sensor (1000Torr):631C13TBEH, Made by MKS
Diaphragm Sensor (10Torr):631C11TBEH, Made by MKS
Diaphragm Sensor (10Torr):722B11TCE2FA, Made by MKS
Main Valve:VEC-SHA8-X0326, Made by CKD
Exhaust Piping
Exhaust Dilution Line
Reactor Tube Press Leak Line
Back Ground Line: HCD, H2O, Catalyst, NF3
Jacket Heater for exhaust pipe:D4EX37739,Made by MKS
Seal Cap Heater:ESH-13049-02,Made by SHINWA VANES
Inlet Heater:D4EX33554,Made by TOKYO GIJUTSU
Cold Trap
Safety
Light Curtain System:SL-C52H, Made by KEYENCE
Other
AGV I/F UNIT: OPTION
OHT I/F UNIT:DMJ-GB1, Prepared By User (E84 Sensor)
CIDRW CONTROLLER: V700-L22-5,Made by OMRON
AMPLIFIER UNIT: V640-HAM12, Made by OMRON
CIDRW HEAD: V640-HS62,Made by OMRON
CHEMICAL FILTER, Made by TOAMEC
Missing/Damaged Parts List:
Please inspect tool to reconfirm
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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