Macquarie Semiconductor and Technology on behalf of Inspire Technologies, Inc.

KLA-Tencor Corp / SensArray SensArray 1790

Asset ID: 210738

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KLA-Tencor Corp / SensArray

SensArray 1790

Temperature Monitoring

Support Equipment (Fab)

Equipment details:

Date of Manufacture:

Currently Configured for: 200mm

Current Equipment Status: Available

Location of Equipment: Caldwell, United States

Available date: Currently Available

SensArray 1790

P/N : 1790A-8-0028

Q'ty : 3

Condition : New and open the box


SensArray 1790


The Process Probe 1790 characterizes and fine-tunes your process conditions to improve equipment performance, wafer quality, and yield. The Process Probe 1790 is designed for use in temperatures ranging from 0°C to 1100°C, and for a wide range of applications including cold wall, RTP, sputtering, CVD, plasma strippers, and epitaxial reactors.

Our specially patented ThermaBond technique is utilized to ceramically bond the deeply immersed thermocouple into a re-entrant cavity in the silicon to improve heat transfer and bond strength. The 1790 allows you to measure wafer temperatures directly, in real time, during each critical step of your process cycle. The Process Probe 1790 optimizes temperature controller parameters, improves uniformity in multi-zone heaters, and determines wafer temperature stabilization times.

Specifications

Technology : ThermaBond Thermocouple Technique

Applications : Wafer; CVD / PVD; Etching

Measurements : Temperature

Wafer / Part Size : 50 to 300 mm (2.0 to 11.8 inch)

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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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