Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)

SEZ Group DV-34

Asset ID: 84908

Print spec sheet

SEZ Group

DV-34

Single Wafer Processing

Etch/Clean - Wet Processing

Equipment details:

Date of Manufacture: 2006

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan, Taiwan

Available date: 12/24/2021

Process: SWC


Tool config is based on original PO, please verify tool details at tool inspection


Process module: HF; Poly (HF+HNO3)

Transfer station: ASYST load port; Brooks robot(Dual arm robot)

Sub-unit: CDS (Chemistry Dispense System)


Transfer Configuration

-Carrier transfer

Carier port*3, Tag reader *3

Port door*3, motor*3

Safty light curtain*2


Wafer transfer

Brooks robot:Dual arm robot

Robot linear module

Flip station*2: left & right


Main body

Left ECO:motor*2

Right ECO:motor*2

ECO linear module

chuck: motor*1

elevator: motor*1

dispenser*4, motor*4 & cylinder*2


Tank: HF

Mixture 1: HF

Process tank material: PVDF

Buffer tank material : PVDF

Process temp: 60℃

Heating method: in-line heater (6KW)

Exhaust method: Manual damper

Process Pump: rotary pump LEVITRONIX (48V -PFA-LV)

Return Punmp: Diaphragm pump, model 110

Tank level sensor: ifm electronic (KN5115)

Drain method: pump drain (membrane pump A 10 TTZ )

Drain line: 2 lines

Chemistry tube material: PFA


Tank: Poly

Mixture 1:HF

2: HNO3

Mixing ratio: HF+HNO3

Process tank material: PVDF

Buffer tank material : PVDF

Process temp: 25℃

Heating method: in-line heater (6KW)

Exhaust method: Manual damper

Concentration meter: HORIBA (CS-153)

Process Pump: rotary pump LEVITRONIX (48V -PFA-LV)

Return Punmp: Diaphragm pump, model 110

dosing pump: METERING PUMP (PZ10)

Paddle wheel: Flowmeter, paddle wheel 

Tank level sensor: ifm electronic (KN5115)

Drain method: pump drain (membrane pump A 10 TTZ )

Drain line: 2 lines

Chemistry tube material: PFA

  

Damage/Missing parts list

Please inspect tool to reconfirm

Dry pumps and customer provided items not included on sales

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Product Images

The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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