Macquarie Semiconductor and Technology on behalf of Micron Memory Japan, K.K. (F15)

Dainippon Screen Mfg. Co. (DNS) SU-3200

Asset ID: 211001

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Dainippon Screen Mfg. Co. (DNS)


Single Wafer Processing

Etch/Clean - Wet Processing

Equipment details:

Date of Manufacture: JAN 2016

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Hiroshima, Japan

Available date: 6/30/2023

Missing or damaged parts: Fab15 confirmed there are no missing or damaged parts.

Tool Model  SU3200
Process  CHX
Software Version (include revision #) V2.642STD00
System Power Rating  208AC 3-phase
Loading Configuration  4 load ports

   Vendor Chm ModelChemicals / Gases Used (not to use Micron Proprietary names)
Chm/Unit Position   2  MPC2__________________DHF(1:30,1:100)/APM(SC1)/CO2Water/HDIW/IPA/PK-HAZ   HotPlate
Chm/Unit Position   3  MPC3__________________DHF(1:30,1:100)/APM(SC1)/CO2Water/HDIW/IPA/PK-HAZ   HotPlate
Chm/Unit Position   4  MPC4__________________DHF(1:30,1:100)/APM(SC1)/CO2Water/HDIW/IPA/PK-HAZ   HotPlate
Chm/Unit Position   5  MPC5__________________DHF(1:30,1:100)/APM(SC1)/CO2Water/HDIW/IPA/PK-HAZ   HotPlate
Chm/Unit Position   6  MPC6__________________DHF(1:30,1:100)/APM(SC1)/CO2Water/HDIW/IPA/PK-HAZ   HotPlate
Chm/Unit Position   7  MPC7__________________DHF(1:10,1:100)/APM(SC1)/CO2Water/HDIW/IPA/PK-HAZ____________________
Chm/Unit Position   8  MPC8__________________DHF(1:10,1:100)/APM(SC1)/CO2Water/HDIW/IPA/PK-HAZ____________________
Chm/Unit Position   9  MPC9__________________DHF(1:10,1:100)/APM(SC1)/CO2Water/HDIW/IPA/PK-HAZ____________________
Chm/Unit Position   10  MPC10__________________DHF(1:10,1:100)/APM(SC1)/CO2Water/HDIW/IPA/PK-HAZ____________________
Chm/Unit Position   11  MPC11__________________DHF(1:10,1:100)/APM(SC1)/CO2Water/HDIW/IPA/PK-HAZ____________________
Chm/Unit Position   12  MPC12__________________DHF(1:10,1:100)/APM(SC1)/CO2Water/HDIW/IPA/PK-HAZ____________________
Chm/Unit Position   13  _SC1____________________CC1;DHF=1:100HFDIW__________________
Chm/Unit Position   14  _SC2____________________CC19;e-flow_________________________________
Chm/Unit Position   15  _SC3____________________DDI;NH4OH/H2O2__________________________________
Chm/Unit Position   16  _EC1____________________CC2;DHF=110  HFDIW__________________
Chm/Unit Position   17  _EC2____________________CC3;DHF=110  HFDIW__________________
Chm/Unit Position   18  _EC3____________________CC4;CHX1 =  PK-HAZ__________________________
Chm/Unit Position   19  _EC4____________________CC5;CHX2 =  PK-HAZ__________________________
Chm/Unit Position   20  _EC5____________________CC6;IPA1____________________________________
Chm/Unit Position   21  _EC6____________________CC7;IPA2____________________________________
Chm/Unit Position   22  _EC7____________________CC20;H-DIW_________________________________
Chm/Unit Position   23  _EC8____________________Exhaust switching box×4set___________
Chm/Unit Position   24  _EC9____________________CC3;HF(49%)_______________


Section 5. N2 Load Port Configuration 

N2 Load Port ExistsN2 Load Port Vendor 
YesSCREENPort1,2 Only

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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.

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