Macquarie Semiconductor and Technology on behalf of Macquarie (Asia) Pte Ltd. Taiwan Branch - UMC

Semitool Inc. Raider SP310

Asset ID: 209707

Print spec sheet

Semitool Inc.

Raider SP310

Single Wafer Processing

Etch/Clean - Wet Processing

Equipment details:

Date of Manufacture: 2004

Currently Configured for: 300mm

Current Equipment Status: Available

Location of Equipment: Tainan 744, Taiwan

Available date: Currently Available

Inspect to confirm configuration and condition.

The Robot / PCB are missing.

Need use the destructive methods to deinstallation the equipment.

Loading Configuration is FOUP

Number of Cassette/FOUP Positions is 25

Original Ship Date from Semitool is 2003Y

Software Version:LT Release Version 2.12.8.1

Date of Last PM is 2016/11/3

The system not On-Line

Off-Line Date is 2017

Electrical Requirements is 480V

All Cables not present  

System Type

Magnum 

Millennium

Raider

Storm I

SAT

SAT

CO2 Fire Suppression System

No 50 wafer load

No Touch Screen panel 

Wafer Payload Size is 25

Acid Modules # of CP Chambers

HEPA Filter System (filter replacement date) is 2015/9/18

Process Material: Semitool

No SecII / GEM Protocol

No Visual Corrosion

Number of Tanks is Three

Bowl Type is N2/IPA

Chemicals Used & Tank #

#1 HF

#2 H2SO4

#3 H2O2

#4 IPA

25 wafer load

No Graphic Controller (320)

Millennium Feature

Number of Chambers is 12

Process Application is Back side clean

Chemicals Used & Tank # #3

#1 HF

#2 H2SO4

#3 H2O2

#4 IPA

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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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