Macquarie Equipment Trading on behalf of Macquarie Finance Korea Co., Ltd. 3237

LAM Research 2300e5 KIYO 45

Asset ID: 11022

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LAM Research

2300e5 KIYO 45

Polysilicon Etch

Etch/Ash/Clean - Plasma Processing

Equipment details:

Date of Manufacture: Apr 2014

Currently Configured for: 300mm

Current Equipment Status: Available

Location of Equipment: Icheon-si, Gyeonggi-do, Korea, Republic of

Available date: TBD

1.  2300 System

  1. 1 * 2300 Strip45 PM
  2. 3 * 2300 Versys Kiyo45 PM, 300mm
  3. 1 * 2300 Etch 6VPM(Platform) 


2300 PROCESS MODULE

2300 VERSYS KIYO45 OPTIONS

  1. 3 * Low Temp ESC Hose kit
  2. 3 * Sym. Liner Door (Improved)
  3. 3 * 2800 L/s Alcatel Turbo Pump
  4. 3 * NSR4846A, 50ft EMO & Gateway
  5. 3 * NSR5712, Bonded Seal Slit Door
  6. 3 * NSR6205, 3/4" Swagelock PCW thin wall


2300 STRIP45 OPTIONS

  1. 1 * VODM
  2. 1 * Stainless Steel w/ 5/8 - 1/2 Reducer

Versys Kiyo45 Quick Clean kit


2300 GAS BOX

2300 VERSYS KIYO45 GAS BOX

  1. 3 * Display Transducer
  2. 3 * Two Heated Gas Lines
  3. 3 * 9 Gas Configuration (IGS)
  4. 21 * Additional Gas Line (IGS)
  5. 3 * NSR MFC

Gas Interface Box, 4 PM

NSR8477, JetStream GB on e5 for K45

NSR8473, FIB for K45x5


2300 PLATFORM

  1. 3 FOUP TDK 
  2. 3 * Hermos Carrier ID 
  3. Light Curtain w/ OHT/RGV
  4. 25 Slot Input Buffer Station
  5. Conditioning Station
  6. User Interface: Side and Front Monitor U
  7. System UPS Circuitry
  8. Earth Leakage Breaker
  9. Cable: TM-Subpanel, 100ft
  10. Sys Calibration and Alignment
  11. Robot CDM
  12. MEV Air Intake
  13. Software Variable ID
  14. ATM Differential Pressure
  15. NSR5711, Slimline 4LED Sig Twr
  16. L1000, Local NSR


2300 SOFTWARE

TEK Software

Wafer Flow Tuning

APC Recipe Tuning Host 2nd HSMS

NSR8423, Hardware Firewall


NSR8625, Degas station for 2300e5

NSR8107, 2300 e5 Platform (2nd Buffer Station)



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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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