Macquarie Semiconductor and Technology on behalf of Intel Resale Corporation
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Date of Manufacture:
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Portland, United States
Available date: Currently Available
· Tool used in Co process
· Factory Interface
o WIP Delivery: OHT
o 4 Position Wide with 2 Loadports
o Loadport Type: Enhanced 25 wafer FOUP
o E99 Carrier ID: HERMOS with RF
o Atmospheric Robot: Kawasaki Single Arm Track Robot
o Light Tower: RYGB Light Tower
· Polisher Unit (Note: Consumables subject to availability)
o Conditioner Head Type: LDF DDF3 on P1, P2, P3
o In Situ Metrology: Full Vision 2 in the 3 platens
o Polisher Head Type: Metal Contour
o Retaining Ring: Grooved TB PPS AEP
o Membrane: Coated Silicon
o 6-Port Upper Pneumatics Assembly
o 3-Pronged wafer chuck
o Input Station Backside Wash
o PRI Wet Robot
o Cleaner: BB1/BB2/ Vapor dryer (Desica cleaner)
o # Scrubbers: 2
o Scrubber Delivery Type: 2 Chem in scrubber 1 and 2
o Hot DI SRD Wash: No
o Inline Metrology: None
o Slurry Delivery System: 3 Slurries/2 Chemicals
o Slurry Dispense Arm: TSDA (tunable slurry dispense arm)
· Factory Hookup / Facilities Information
o 36” Cleaner Workspace
o Cleaner Drain Manifold: 2 Lines
o Electrical: 200/208 VAC; 50/60 Hz; 30mA GFCI
o CE Mark / Compliant
· Automation / Remote Options
o 2 Touchscreen FPD Monitors
o Monitor 1 Location: On Cart
o Monitor 2 Location: At Factory Interface position 3
· Additional Information available upon request
NOTE: Tool configuration shown is accurate to the knowledge of Intel Resale Corporation. Actual configuration may vary. All sales are “as is” and buyer is advised to conduct its own inspections. Other names and brands may be claimed as the property of others.
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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