Macquarie Semiconductor and Technology on behalf of Micron Memory Japan, G.K. (F15)
Date of Manufacture: tbd
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Hiroshima, Japan
Available date: Currently Available
Tool has been de-installed and is stored in an off-site warehouse.
A Hard Disk Drive will be removed from tool.
Other missing or damaged parts: Not reported.
Light source：Deep UV Lamp,Metal halide Lamp
Wave Length：E-Line ～ 248nm,VIS
Minimum Line Width：55nm
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