Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)
Etch/Ash/Clean - Plasma Processing
Date of Manufacture: 2010
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Taoyuan, Taiwan
Available date: Currently Available
DRY ETCH 11-3LAM_EXELAN_OX_04 LAM 2300XLAN CUOX
Tool config is based on original PO, please verify tool details at tool inspection
FI SN: 1017439-10-35-0784
Chamber SN: H23EX-112 (F129757- PM1), H23EX-113 (F129757- PM2),
H23EX-114 (F129757- PM3), H23EX-115 (F129757- PM4)
Tool Model: EXELAN
Process: EXELAN OX
Software Version: 1.8.4-SP11-HF5 release
System Power Rating: 208 AC 3-Phase
Loading Configuration: 3 Load ports
Chm Position 1:EXELAN; Chemicals / Gases Used: C4F8, CF4, H2, CH2F2
Chm Position 2: EXELAN; Chemicals / Gases Used: C4F8, CF4, H2, CH2F2
Chm Position 3: EXELAN; Chemicals / Gases Used: C4F8, CF4, H2, CH2F2
Chm Position 4: EXELAN; Chemicals / Gases Used: C4F8, CF4, H2, CH2F2
Standard Specs
Software Revision: 1.8.4-SP11-HF5 release
Factory Automation: OHT PIO Sensor
AMHS: AMHS - OHT or manual deliver - Factory Interface
Wafer Size: Diameter 300+/- 0.05mm(SEMI M28), 775 +/- 25um, Notch
Carrier: FOUP (Comply with SEMI E47.1 (25wafers))
Inter Face: 3 carrier stage (Continuous flow operation)
Online Connection: GEM / CIM JGJ (Hardware Interface : Ethernet 100Base-Tx)
"Small Wip Buffer
FIX THIS: 4 Station Small Wip Buffer. With Semi compliant MENV and FIMS assemblies"
Utility Box: Regulator : Air/AR2500(SMC), N2/SQ-420E(VERUFLO), He/SQMICRO(VERIFLO)
Utility Box: Manual Valve : OGD20V-6RM-K / OGD10V-4RM-K (CKD)
Utility Box: Pressure Gauge : Bourdon Gauge
Platform Type: Version 2
UPS on system: Yes
Earth Leakage Breaker: Yes (for Fab 3 only)
Gas Box: Transport Module, GIB for 16 lines IGS GBX
Monitor: 2 (Flat Panel Display Touch Screen Type, 1; Fromt, 1; Side)
Signal Tower: Red/Orange/Green/Blue (Upper Left of Front x1 &
Upper right section of loader on maintenance side x1)
EMO: Front x2, Rear x6
Conditioning Station: No
Foreline: Not Heated
Sub-panel: Dual Drop Sub-panel
Interconnect Cables: TM to sub-panel, 50 ft
Pump to TCU: 50 ft
TCU to PM: 50 ft
PM to Pump Interconnect: 50 ft
Inter Lock: Gas Box Door (I/L Signal is sent to the Factory)
Inter Lock: External (When the I/L signal is received from Factory,
gas valves are closed)
Support Remote Units
Chiller Lower: ATS DEX 20A- Customer Provided
Coolant: FC3283
Chiller Hose: 5/8 ID Braided Stainless Flex- Customer Provided
RF Generator 2 MHz: Including RF Cable Tru-8743-07 ( 7 ft cable )
RF Generator 27 MHz: Including RF Cable Tru-8743-07 ( 7 ft cable )
RF Matcher, 2-27 MHz, DFC: RF Matcher, 2-27 MHz, DFC
Wafer ID Reader: WIDS Bottom Read
Carrier ID Reader: Asyst RF Advantag
Hardware Config
Process Chb.1,2,3,&4: 2300 Exelan Flex 45 Ready
(Without Captive Cam Ring)
25 Wafer Input Buffer Station: KIT,JIT<OPT<25 STATION BUFFER,300MM
Endpoint type: Optical Emission Spectroscopy
ESC type: Dual Zone/Flex Bipolar
Focus ring: Hot Edge, Si
High-conductance Wap Ring: 4 Ring
Gap: 2.34 cm
TMP: TMP-Edwards 1603
Dry Pump: IH600 (EDWARDS) ; Customer Supply
Transfer Module Backing Pump: EPX with N2 Gas Module
Pressure Monitor: C/M ( Process Monitor ) 628B01TDE1B (MKS ) 1 Torr
Pressure Monitor: C/M ( Service Monitor ) 625A-14059 10 Torr
Pressure Monitor: C/M ( Foreline Monitor ) 625A-14059 10 Torr
Pressure Monitor: Absolute Pressure switch 75 Torr Lam P/N 768-093959-001
Pressure Monitor: Differential Pressure switch Activation 7mm Hg Vac
Precision Sensors P/N D48W-14
Upper Electrode: Heated Constant Temperature Control
Coolant Temp Monitor Kit: Coolant Temp Monitoring Kit for Top Plate & Lower Electrode
O-Rings: FluoroSilicone
Chamber Isolation Valve: Barrier Seal Door
Wafer Lift Mechanism: Direct Drive
Gas Position
Gas line 1: Gas line 1-C4F8 50 sccm- STEC Z300
Gas line 2: Gas line 2-CF4 200 sccm- STEC D200
Gas line 3: Gas line 3-O2 3000 sccm- STEC Z300
Gas line 4: Gas line 4-Ar 1000 sccm- STEC D200
Gas line 5: Gas line 5-Blank (for future use)
Gas line 6: Gas line 6-H2 1500 sccm- STECZ300
Gas line 7: Gas line 7-O2 50 sccm-STEC Z300
Gas line 8: Gas line 8-CHF3 50 sccm- STEC Z300
Gas line 9: Gas line 9-CH2F2 100 sccm- STEC Z300
Gas line 10: Gas line 10-C4F6 50 sccm- STEC Z300
Gas line 11: Gas line 11-He/O2 (O2-30%) 100 sccm- STEC Z300
Gas line 12: Gas line 12-N2 1000 sccm- STEC Z300
Gas line 13: Gas line 13-CF4 1000 sccm- STEC Z300
Gas line 14: No gas- Need piping
Gas line 15: No gas- Need piping
Gas line 16: No gas- Need piping
Tuning Gas: He/O2(O2;30%) 50 sccm- STEC Z300
Gas Box Config
Filter: Final gas : Mykrolis (P/N WG2FT1RR2)
Gas Box Inlet Option: Regulated Inlet Gas Panel
Non-standard PM/GB Feature: Stone Henge Gas Box
with GIB Option 16 lines single contained Hasteloy lines.
Gas Line Pressure Transducer: Actual pressure transducer WITHOUT digital readout
Regulator: SQMICRO (VERIFLO)
Piping: Single Contained Hasteloy Piping
(Gas box to Final valve & Exhaust through Gas box)
Final Pressure Switch: Absolute Pressure switch 400 torr Lam P/N 796-002833-003
Process Kit Config
Upper Outer Electrode: ASSY,ELCTD,OUTER,.18 STEP,300M
Upper Inner Electrode: ASSY,ELCTD,INNER,TC,300MM
Quartz WAP Ring: RING,WAP,Twist Lock,17IN,300MM
Quartz Generic Ring: RING,WAP,QTZ
Gas Feed Ring: Ring, Ptn, Gas Feed, Dual Zone
Dual Zone ESC: ESCASSY,DZ CLG,2 FNSH,300MM
ESC Bolts: ESC Bolts - 10-32 x1.125 lng, vented
Edge Ring Cover (In): COV,H/E RING,QTZ
Focus Cover Ring: B,FOCUS R CVR,DFC 300MM
Hot Edge Ring: RING,HOT EDGE,.195 HGT,SI,DUAL ZONE ESC
Edge Ring Cover (Out): RING,COVER,OUTER,GND
Fixed Coupling Ring: RING,TOP,ADJ,CPLG,2300,300MM,D
Ground Shield: SHLD,GND,300MM,2300
Liner: LINER/SPCR,EXT GND RING,2.0CM GAP
4-ringer Hangers: HANGER,4R,.025,.08-.08-.12-.12,.010FW
Retainer Spring: ASSY RETAINER SPRING
1/4-20 Peek Nut: NUT,1/4-20,VIRGIN PEEK
Peek Clocking Washer: WSHR,FL,PEEK,.263IDX.682ODX.06THK
Peek Sleeve: SLV,ADPTR,SLIP-ON,SELFCNTR,V PEEK
0.010 Peek Pad: PAD,R,CONF,.010THK.300MM
Damage/Missing parts list
Please inspect tool to reconfirm
Dry pumps and customer provided items not included on sales
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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