Macquarie Semiconductor and Technology on behalf of Macquarie Finance Korea Co., Ltd.

LAM Research 2300e4 Exelan Flex DX

Asset ID: 13537

Print spec sheet

LAM Research

2300e4 Exelan Flex DX

Dielectric Etch

Etch/Ash/Clean - Plasma Processing

Equipment details:

Date of Manufacture: 2015

Currently Configured for: 300mm

Current Equipment Status: Available

Location of Equipment: Icheon-si, Gyeonggi-do, Korea, Republic of

Available date: 12/23/2021

2300 System


3* 2300 Flex DX

1 * 2300 e4 Platform

1 * 2300 System Incentive (4 PM)


2300 PROCESS MODULE


3 * 2300 FLEX D SERIES OPTIONS

  • 4XX Series ESC
  • 10 GPM Flow Meter
  • PM Facilities: Dual w/ Temp Monitor
  • 60 MHz Generator
  • Adjustable Gap
  • Dual Zone ESC Cooling - Flex D Series
  • Standard Conductance Kit - Flex D Ser.
  • Heated Foreline Manometer
  • Interconnect Hardware: Pump to TCU 100ft
  • Interconnect Hardware: TCU to PM 100ft
  • Interconnect Hardware: Pump to PM 100ft
  • EMO Cable: TCU to RPDB 50ft
  • EMO Cable: Pump to RPDB 50ft
  • Talon

1 * 2300 Flex D Series Quick Clean Kit


2300 GAS BOX


3* 2300 FLEX D SERIES GAS BOX OPTIONS

  • 30 * Jetstream Gas Line
  • 6 * Heated Gas Line
  • 3 * NSR MFC

1 * Facility Interface Box (System)

17 * Facility Interface Box (Per Line)


2300 PLATFORM

1 * 3 FOUP

3 * Hermos Carrier ID

1 * Light Curtain w/ OHT/RGV

1 * 25 Slot Input Buffer Station

1 * Conditioning Station

1 * User Interface: Side and Front Monitor U

1 * System UPS Circuitry

1 * Earth Leakage Breaker

1 * Cable: TM-Subpanel, 100ft

1 * Sys Calibration and Alignment

1 * MEV Air Intake

1 * NSR8423, Hardware Firewall

1 * ATM Differential Pressure

1 * Skywhite Front Fascia

1 * 2300 e4 Platform Options


2300 SHIP AHEAD

1 * Standard Ship Ahead Items


2300 SOFTWARE

1 * TEK Software

1 * Wafer Flow Tuning

1 * APC Recipe Tuning Host

1 * 2nd HSMS

1 * NSR5201, FDC for 2nd HSMS Part

1 * NSRL1000, Local NSR

 






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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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