Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)
Etch/Ash/Clean - Plasma Processing
Date of Manufacture: 2006
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Taoyuan, Taiwan
Available date: Currently Available
Process: OX
Tool config is based on original PO, please verify tool details at tool inspection
FI SN: 101543506310528
Chamber SN: 23EX1593(F97589-PM1), 23EXF1594(F97589-PM2), 23EXF1595(F97589-PM3), 23EXF1751(F106896-PM1),
Standard Specs
Software Revision: 1.7.2 SP2 HF4 CST2
Factory Automation: OHT PIO Sensor
AMHS: AMHS - OHT or manual deliver - Factory Interface
Wafer Size: Diameter 300+/- 0.05mm(SEMI M28), 775 +/- 25um, Notch
Carrier: FOUP (Comply with SEMI E47.1 (25wafers))
Inter Face: 3 carrier stage (Continuous flow operation)
Online Connection: GEM / CIM JGJ (Hardware Interface : Ethernet 100Base-Tx)
Interface A: Hardware related to EDA Note: This is a cost option.
Small Wip Buffer FIX THIS: 4 Station Small Wip Buffer. With Semi compliant MENV and FIMS assemblies
Utility Box: Regulator : Air/AR2500(SMC), N2/SQ-420E(VERUFLO), He/SQMICRO(VERIFLO)
Utility Box: Manual Valve : OGD20V-6RM-K / OGD10V-4RM-K (CKD)
Utility Box: Pressure Gauge : Bourdon Gauge
Platform Type: Version 2
UPS on system: Yes
Earth Leakage Breaker: Yes (for Fab 3 only)
Gas Box: Transport Module, GIB for 16 lines IGS GBX
Monitor: 2 (Flat Panel Display Touch Screen Type, 1; Fromt, 1; Side)
Signal Tower: Red/Orange/Green/Blue (Upper Left of Front x1 & Upper right section of loader on maintenance
side x1)
EMO: Front x2, Rear x6
Conditioning Station: No
Foreline: Not Heated
Sub-panel: Dual Drop Sub-panel
Interconnect Cables: TM to sub-panel, 50 ft
Pump to TCU: 50 ft
TCU to PM: 50 ft
PM to Pump Interconnect: 50 ft
Inter Lock: Gas Box Door (I/L Signal is sent to the Factory)
Inter Lock: External (When the I/L signal is received from Factory, gas valves are closed)
Support Remote Units
Chiller Lower: ATS DEX 20A
Coolant: FC3283
Chiller Hose: 5/8 ID Braided Stainless Flex
RF Generator 2 MHz: Including RF Cable Tru-8743-07 ( 7 ft cable )
RF Generator 27 MHz: Including RF Cable Tru-8743-07 ( 7 ft cable )
RF Matcher, 2-27 MHz, DFC: RF Matcher, 2-27 MHz, DFC
Wafer ID Reader: WIDS Bottom Read
Carrier ID Reader: Asyst RF Advantag
EIM Server: EIM Server-One EIM server per 8 frames
Hardware Config
Process Chb.1,2,3,&4: 2300 Exelan Flex 45 Ready (Without Captive Cam Ring)
25 Wafer Input Buffer Station: KIT,JIT<OPT<25 STATION BUFFER,300MM
Endpoint type: Optical Emission Spectroscopy
ESC type: Dual Zone/Flex Bipolar
Focus ring: Hot Edge, Si
High-conductance Wap Ring: 4 Ring
Gap: 2.34 cm
TMP: ALCATEL ATH,1600M
Dry Pump: IH600 (EDWARDS) ; Customer Supply
Transfer Module Backing Pump: EPX with N2 Gas Module
Pressure Monitor: C/M ( Process Monitor ) 628B01TDE1B (MKS ) 1 Torr
Pressure Monitor: C/M ( Service Monitor ) 625A-14059 10 Torr
Pressure Monitor: C/M ( Foreline Monitor ) 625A-14059 10 Torr
Pressure Monitor: Absolute Pressure switch 75 Torr Lam P/N 768-093959-001
Pressure Monitor: Differential Pressure switch Activation 7mm Hg Vac Precision Sensors P/N D48W-14
Upper Electrode: Heated Constant Temperature Control
Coolant Temp Monitor Kit: Coolant Temp Monitoring Kit for Top Plate & Lower Electrode
O-Rings: FluoroSilicone
Chamber Isolation Valve: Barrier Seal Door
Wafer Lift Mechanism: Direct Drive
Gas Position
Gas line 1-C4F8 50 sccm- AERA FC-D780CU
Gas line 2-O2 50 sccm- AERA FC-D780CU
Gas line 3-CHF3 100 sccm-AERA FC-D780CU
Gas line 4-CF4 200 sccm-AERA FC-D780CU
Gas line 5-30% O2/HE 100 sccm-AERA FC-D780CU
Gas line 6-C4F6 50 sccm- AERA FC-D780CU
Gas line 7-CH2F2 50 sccm-AERA FC-D780CU
Gas line 8-CF4 1000 sccm- AERA FC-D780CU
Gas line 9-H2 1500 sccm- AERA FC-D780CU
Gas line 10-AR 1000 sccm- AERA FC-D780CU
Gas line 11-N2 1000 sccm- AERA FC-D780CU
Gas line 12-O2 3000 sccm- AERA FC-D780CU
Tuning Gas: 30% O2/HE 50 sccm-AERA FC-D780CU
Gas Box Config
Purge: N2 (Process Grade N2) (Customer Supplied)
Filter: Final gas : Mykrolis (P/N WG2FT1RR2)
Gas Box Inlet Option: Regulated Inlet Gas Panel
Non-standard PM/GB Feature: Enhanced gas box with 12 gas lines.
Gas Line Pressure Transducer: Actual pressure transducer WITHOUT digital readout
Regulator: SQMICRO (VERIFLO)
Piping: Single Contained Hasteloy Piping (Gas box to Final valve & Exhaust through Gas box)
Final Pressure Switch: Absolute Pre
Damage/Missing parts list
Please inspect tool to reconfirm
Dry pumps and customer provided items not included on sales
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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