Macquarie Semiconductor and Technology on behalf of Macquarie (Asia) Pte Ltd. Taiwan Branch - UMC
Date of Manufacture: 2012
Currently Configured for: 300mm
Current Equipment Status: Available
Location of Equipment: Tainan 744, Taiwan
Available date: Currently Available
Inspect to confirm configuration and condition.
The mainframe has been removed to other fab, so it is impossible to determine whether the remaining parts are damaged or can used adn there is only one chamber(EmerALD 3000) left on this equipment.
Tool Model : XP Platform
System SW(OS) version is Ver 1. 58a1-001
All cables are present
Have missing /damaged parts need inspection to confirm.
Robot Type is Yawuski
Power Supply & AC Dist Box : P/N 1060-625-01
Backing Pump(s) : ALD/LL/WHC is EDWARDS-IXH1210
Heater Jacket : INTRACO TAIWAN CORPORATION
Facility Requirements :
CDA LLC PN2 : 403
DIW : 2.95
Vacuum Load Port vacuum : -86.2
Gas LLC Pressure : 0.56/0.209 MPA
FI : 100 Pa
Ar : 500 SCCM
N2 : 500 SCCM
Ar : 3 SLM
Differential : 3.5 Pa
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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