Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)
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Etch/Ash/Clean - Plasma Processing
Date of Manufacture: 2003-12-01
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Taoyuan, Taiwan
Available date: Currently Available
Tool config is based on original PO, please verify tool details at tool inspection
OEM: AMAT
Tool Model: EMAX
System Power Rating: 208 AC power
Loading Configuration: 3 Load port
Retrofit Part Type 1: NA
Chamber Name 1: A
Chamber Name 2: B
Chamber Name 3: C
Chamber Name 4: D
Chamber 1 Description: EMAX
Chamber 2 Description: EMAX
Chamber 3 Description: EMAX
Chamber 4 Description: EMAX
N2 Load Port Exists 1: No
N2 OEM Stage Available 1: No
N2 Load Port Exists 2: No
N2 OEM Stage Available 2: No
N2 Load Port Exists 3: No
N2 OEM Stage Available 3: No
Optional Gas 1: GAS #1
Optional Gas 2: GAS #2
Optional Gas 3: GAS #3
Optional Gas 4: GAS #4
Optional Gas 5: GAS #5
Optional Gas 6: GAS #6
Optional Gas 7: GAS #7
Optional Gas 8: GAS #8
Optional Gas 9: GAS #9
Optional Gas 10: GAS #10
Optional Gas 11: GAS #11
Optional Gas 12: GAS #12
Optional Gas 13: NA
Custom Gas Lines 1: C4F6, 150sccm
Custom Gas Lines 2: Empty
Custom Gas Lines 3: O2, 2000sccm
Custom Gas Lines 4: H2, 500sccm
Custom Gas Lines 5: H2, 200sccm
Custom Gas Lines 6: C4F8, 50sccm
Custom Gas Lines 7: O2, 250sccm for CHA CHB. O2, 50sccm for CHC. O2, 200sccm for CHD
Custom Gas Lines 8: Empty
Custom Gas Lines 9: CHF3, 200sccm
Custom Gas Lines 10: CF4, 500sccm for CHA. CF4, 200sccm for CHB CHC CHD
Custom Gas Lines 11: Ar, 200sccm for CHA CHB CHC. empty for CHD
Custom Gas Lines 12: Ar, 1500sccm for CHA CHB CHC. Ar, 300sccm for CHD
Custom Gas Lines 13: NA
Damage/Missing parts list
Please inspect tool to reconfirm
Dry pumps and customer provided items not included on sales
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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