Macquarie Semiconductor and Technology on behalf of Micron Memory Japan, K.K. (F15)
Date of Manufacture:
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Hiroshima, Japan
Available date: Currently Available
Tool has been de-installed and is stored in an off-site warehouse.
Missing or damaged parts: Fab15 confirmed there are no missing or damaged parts.
UF3000 Standard Feature
Overall Accuracy Within 2 µm
Wafer Size 8", 12"
X/Y axis Probing Area ±170 mm (X/Y axis Probing Area)
X/Y axis Maximum Speed X axis 300 mm/s Y axis 230 mm/s
Z axis Full Stroke 37 mm
Z axis Maximum Speed 30 mm/s
θ axis Rotation Range ±5 deg.
Fine Alignment CCD ITV Image Processing
Loader Cassette Mounts 1 (2nd cassette with option)
Loader Wafer Handling Robot Arm / Backside Holding
Hard Disk 3.5" 20GB (1 unit standard)
Floppy Disk 3.5" 2HD / 2DD (1 unit standard)
MO 230 / 540MB (1 unit standard)
Display 12.1" TFT Color LCD
Power Consumption Less than 2kVA
Air Supply Source Pressure 0.6 MPa or more
Air Supply Consumption Approximately 0.1 liters / wafer
Vacuum Supply Less than -80 kPa, 30 liters / minute
Dimensions 1508W × 1587D × 987 H mm
Weight 1500 kg (Standard)
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