Macquarie Semiconductor and Technology on behalf of Micron Japan, Ltd.
Date of Manufacture:
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Hiroshima, Japan
Available date: Currently Available
X,Y Overall Accuracy：±2.0µm (Temp Stability ±1℃
X,Y Stage Accuracy：±1.0µm
Z Axis Stroke(Applicable stroke)：37mm
Z Axis Control Accuracy：±2µm
Temp. Range：-40 to 150℃
Tool was connected with a T5377S tester before de-installation.
HINGE INCLUDED IN TOOL. MODLE: MHF6000.
Tool has been de-installed and is stored in an off-site warehouse.
A Hard Disk Drive will be removed from tool.
Other missing or damaged parts: Not reported.
No pictures provided: Please inspect to collect photos.
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
Get in touch
Ask about our equipment solutions, ranging from Macquarie equipment inventory sales, sourcing programs, surplus disposition options, and direct equipment purchases.