Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)
Date of Manufacture: 2015
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Taoyuan, Taiwan
Available date: 5/14/2021
Process: NITR
From original tool PO, please inspect to verify
2.2- General Specification
Safety Specification: SEMI S2-0703
Heater Model: Mid-Temp. VCM-50-012L
Compatible with Atmospheric Process: None
Maximum Operating Temperature (C): 800C
ART Control: Yes
N2 Load Lock: Yes
Wafer Type: 300mm-Si SEMI STD-Notch
Qty. of Production Wafers: 50
Software Version (WAVES): 2.12 REV.R006
Seismic Isolation Configuration: None
3.1.1- Furnace Spec, Furnace
Dewpoint Meter for N2 LL: None
Loading Area Light: White (LED)
RCU Duct Length FNC - RCU: 20m
Ionizer (maker/model): None
Chemical PreFilter-Acid: None
Chemical PreFilter-Alkali: None
Chemical PreFilter-Hydrocarb: Yes
Chemical PreFilter-Location: FNC Top
Side Maintenance: None
3.1.2- Furnace Spec, Wafer/Carrier Handling
Carrier Type: FOUP/25slots, SEMI STD
FOUP Maker/Model: Entegris/A300
Carrier Stage Capacity: 10
Info Pad A,B: Pin
Info Pad C,D: Pin
Fork Material: Al2O3
3.1.3- Furnace Spec, Furnace Facilities
Furnace Exhaust Connection Point: Top Connection
Cooling Water Connection Point: Bottom Connection
Electric Fan Exhaust Facility Connection: Not Installed
Air Intake Point: Top
3.2.1- Gas Spec, Gas Distribution System
IGS Type: IGS 1.5"W-Seal rail-mount
IGS Maker: Fuijikin
Tubing Bends: Bend (Less than 91deg)
IGS Final Filter: Entegris
IGS Regulator: CKD
IGS MFC (Maker/Type): HORIBA STEC / Digital
IGS MFC for low flow N2 purge when cleaning: HORIBA STEC / SEC-G111
IGS Press. Transducer: Nagano
Liquid Source Vapor System Maker / Model: HORIBA STEC / LSC-F510
Auto-Refill System- : Schumacher / CG100
Auto Refill System Provider: Provided by customer
Refill System Tubing interconn: Provided by customer
Ozone Delivery System: None
Ozone Delivery System Provider: None
Water Vapor Generator (WVG): None
3.2.2- Gas Spec, Gas Facilities
Incoming Gas Connection Point: Bottom Connection
Gas VENT Connection Point: None
Exhaust VENT Connection Point: Bottom Connection
Gas Unit Exh Connection Point: Bottom Connection
3.3.1- Exhaust Specificationbution
Vacuum Gage - Press Ctrl: MKS (Hot) Capacitance Manometer
Vacuum Gage - Press Monitor (133kPa): MKS (Hot) Capacitance Manometer
Vacuum Gage - Pump Monitor: MKS (Hot) Capacitance Manometer
Main Valve: CKD-VEC 3"
Pump Maker/Model: EDWARDS / iXH-1820T
Pump Provided by: Customer
Abatement System Type: Burning Type
Abatement System (Maker/Model): EDWARDS / TCS
Abatement System Provider: Customer
N2 Dilution Unit Provided by: No NDU
Pump Power: Customer's Facility Provided
Pump Control Unit Setting Location: Power Box Top
Pump-FNC Vacuum Piping Provide: Customer
3.4.1- Reactor Specification
Quartz Provided by: Customer
Cap Type: Quartz
Cap Heater: Yes
Switch Valve for Cap Cooling Water: Yes
Cooling Water for Cap Rotation: Yes
Heat Shield Type: HS Plate
3.5.1- Power Specification, Power dist System
Voltage 3phase: 480VAC
3phase connection type: Star Connection
Voltage Single-phase: None
Single-phase connection type: N/A
Frequency: 60Hz
Wattmeter: None
Control Power UPS provided by: N/A
Control Power UPS type: N/A
UPS Input/Output Voltage: N/A
3.5.2- Power Specification, Cable Length
Power Cable Input Entrance Loc: Power Box Top
Other power requirement: None
FNC - Power Box: 30m
FNC - RCU: 30m
Power Box - Pump Unit: 30m
Power Box - Refill System: 30m
Damage/Missing parts list
Please inspect tool to reconfirm
Dry pumps and customer provided items not included on sales
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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