Tokyo Electron Ltd. TELFORMULA Nitride

Equipment details:

Date of Manufacture: 2015

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan, Taiwan

Available date: 6/11/2021

Process: NITR

From original tool PO, please inspect to verify

2.2- General Specification

Safety Specification: SEMI S2-0703

Heater Model: Mid-Temp. VCM-50-012L

Compatible with Atmospheric Process: None

Maximum Operating Temperature (C): 800C

ART Control: Yes

N2 Load Lock: Yes

Wafer Type: 300mm-Si SEMI STD-Notch

Qty. of Production Wafers: 50

Software Version (WAVES): 2.12 REV.R006

Seismic Isolation Configuration: None

3.1.1- Furnace Spec, Furnace

Dewpoint Meter for N2 LL: None

Loading Area Light: White (LED)

RCU Duct Length FNC - RCU: 20m

Ionizer (maker/model): None

Chemical PreFilter-Acid: None

Chemical PreFilter-Alkali: None

Chemical PreFilter-Hydrocarb: Yes

Chemical PreFilter-Location: FNC Top

Side Maintenance: None

3.1.2- Furnace Spec, Wafer/Carrier Handling

Carrier Type: FOUP/25slots, SEMI STD

FOUP Maker/Model: Entegris/A300

Carrier Stage Capacity: 10

Info Pad A,B: Pin

Info Pad C,D: Pin

Fork Material: Al2O3

3.1.3- Furnace Spec, Furnace Facilities

Furnace Exhaust Connection Point: Top Connection

Cooling Water Connection Point: Bottom Connection

Electric Fan Exhaust Facility Connection: Not Installed

Air Intake Point: Top

3.2.1- Gas Spec, Gas Distribution System

IGS Type: IGS 1.5"W-Seal rail-mount

IGS Maker: Fuijikin

Tubing Bends: Bend (Less than 91deg)

IGS Final Filter: Entegris

IGS Regulator: CKD

IGS MFC (Maker/Type): HORIBA STEC / Digital

IGS MFC for low flow N2 purge when cleaning: HORIBA STEC / SEC-G111

IGS Press. Transducer: Nagano

Liquid Source Vapor System Maker / Model: HORIBA STEC / LSC-F510

Auto-Refill System- : Schumacher / CG100

Auto Refill System Provider: Provided by customer

Refill System Tubing interconn: Provided by customer

Ozone Delivery System: None

Ozone Delivery System Provider: None

Water Vapor Generator (WVG): None

3.2.2- Gas Spec, Gas Facilities

Incoming Gas Connection Point: Bottom Connection

Gas VENT Connection Point: None

Exhaust VENT Connection Point: Bottom Connection

Gas Unit Exh Connection Point: Bottom Connection

3.3.1- Exhaust Specificationbution

Vacuum Gage - Press Ctrl: MKS (Hot) Capacitance Manometer

Vacuum Gage - Press Monitor (133kPa): MKS (Hot) Capacitance Manometer

Vacuum Gage - Pump Monitor: MKS (Hot) Capacitance Manometer

Main Valve: CKD-VEC 3"

Pump Maker/Model: EDWARDS / iXH-1820T

Pump Provided by: Customer

Abatement System Type: Burning Type

Abatement System (Maker/Model): EDWARDS / TCS

Abatement System Provider: Customer

N2 Dilution Unit Provided by: No NDU

Pump Power: Customer's Facility Provided

Pump Control Unit Setting Location: Power Box Top

Pump-FNC Vacuum Piping Provide: Customer

3.4.1- Reactor Specification

Quartz Provided by: Customer

Cap Type: Quartz

Cap Heater: Yes

Switch Valve for Cap Cooling Water: Yes

Cooling Water for Cap Rotation: Yes

Heat Shield Type: HS Plate

3.5.1- Power Specification, Power dist System

Voltage 3phase: 480VAC

3phase connection type: Star Connection

Voltage Single-phase: None

Single-phase connection type: N/A

Frequency: 60Hz

Wattmeter: None

Control Power UPS provided by: N/A

Control Power UPS type: N/A

UPS Input/Output Voltage: N/A

3.5.2- Power Specification, Cable Length

Power Cable Input Entrance Loc: Power Box Top

Other power requirement: None

FNC - Power Box: 30m

FNC - RCU: 30m

Power Box - Pump Unit: 30m

Power Box - Refill System: 30m

Damage/Missing parts list

Please inspect tool to reconfirm

Dry pumps and customer provided items not included on sales