Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)
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Date of Manufacture: 2010-01-01
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Taoyuan, Taiwan
Available date: Currently Available
Tool config is based on original PO, please verify tool details at tool inspection
Process: Oxide
Software Version: V6.07 VER:002
System Power Rating: 120V & 480V
Loading Configuration: 4 lots Loading
General Specification
Safety Specification: SEMI S2-0703/CE
Heater Model: Low-Temp. VMM-56-201 4zone / 150-600 (C)
Process Condition: LP
Maximum Operating Temperature(C): 250-300
ART Control: None
N2 Load Lock: Yes
Wafer Type: 300mm-Si SEMI STD-Notch
Qty. of Production Wafers: 100
Boat Operation (Handling Position): 2 Boat Type (B/E)
Software Version (WAVES): Ver.6.07 Rev.002
Seismic Isolation Configuration: None
Dewpoint Meter for N2 Load Lock: None
Loading Area Light: White (LED)
RCU Duct Length FNC - RCU: N/A
Ionizer Maker / Model: None
Chemical Pre-filter (for Acid): None
Chemical Pre-filter (for Alkali): None
Chemical Pre-filter (for Hydrocarbon): None
Chemical Pre-filter Location: N/A
Side Maintenance: None
O2 Density control for N2 Load Lock: Yes
N2 Boat Shower Wafer Cooling: Yes
Furnace Temperature Controller: Model560A
Carrier Type: FOUP / 25slots SEMI STD
FOUP Maker / Model: Entegris / A300
Carrier Stage Capacity: 16
Info Pad A,B: Pin
Info Pad C,D: Pin
Fork Material: Al2O3+PEEK
W/T Type: 1+4 Edge Grip
W/T Auto Teaching: Yes
Furnace Exhaust Connection Point: Top Connection
Cooling Water Connection Point: Bottom Connection
RCU Duct Connection Point: N/A
Gas Specification
IGS Type: IGS 1.5"W-seal rail-mount
IGS Maker: Fujikin
Tubing Bends: Bend (Less than 90deg.)
IGS Final Filter: PALL(SUS)
IGS Regulator: CKD
IGS MFC Maker / Type: HORIBA STEC / Digital
IGS Press. Transducer: Nagano
Liquid Source Vapor System Maker / Model:
Liquid Source Vapor System Maker / Model: HORIBA STEC / LSC F730 Series
Auto-Refill System Maker / Model: SCHUMACHER / CG400
Auto-Refill System Provided By: Customer
Refill System Tubing Interconnect By: Customer
Ozone Delivery System Maker / Model: MKS / AX8575-29
Ozone Delivery System Provider: Customer
External Torch Unit: N/A
Water Vapor Generator (WVG): N/A
PAC: None
Incoming Gas Connection Point: Bottom Connection
Gas Vent Connection Point: None
Exhaust Vent Connection Point: Bottom Connection
Gas Unit Exh. Connection Point: Bottom Connection
Process Gas Exhaust Connection Point: Bottom Connection
Exhaust Specification
Vacuum Gauge - Press Ctrl: MKS (Hot) Capacitance Manometer
Vacuum Gauge - Press Monitor (133kPa): MKS (Hot) Capacitance Manometer
Vacuum Gauge - Pump Monitor: MKS (Hot) Capacitance Manometer
Main Valve: CKD-VEC
Pump Maker / Model: EDWARDS / IXH-1820
Pump Provided by: Customer
Abatement System Type: Burning Type
Abatement System Maker / Model: Edwards / ATLAS-TCS
Abatement System Provided by: Customer
N2 Dilution Unit Provided by: No NDU
Pump Power: Customer's Facility Provided
Pump Control Unit Setting Location: Power Box
Pump-FNC Vacuum Piping Provided By: Customer
Exhaust Pressure Control for AP Process: N/A
Exhaust Pressure Controller for AP Process Maker / Model: N/A
Vacuum Exhaust System: 4inch Pipe
Trap: N/A
Vacuum Pressure Controller: CKD-VEC
Burn Out Unit: N/A
Condenser: N/A
Reactor Specification
Quartz Meterial Requirement: Electric Fused
Quartz Provided by: Customer
Quartz Vendor Requirement: None
SiC Provided by: N/A
SiC Vendor Requirement: N/A
Liner Tube (AP): N/A
Process Tube (AP, AP+Sub-AP): N/A
Outer / Inner Tube Material (LP): Quartz / Quartz
Inner Tube Type (LP): Fixed top plate Narrow slit, 5mm gap (special ,see below)
Inner T/C: Outer Tube interior wall type (for CVD)
Tube Sealing: O-Ring
Manifold Heater: Yes
Switch Valve for Manifold Cooling Water: Yes
Soft Backfill Injector: Yes
Boat Type: 117 slots Ladder(8mm pitch)
Boat Material: Quartz
Boat Rotation: Yes
Pedestal Type: Quartz
Turn Table Type: Inconel
Cap Heater: Yes
Auto Shutter: Shutter Purge Type
Earthquake Countermeasure: None
Power Specification
Voltage 3phase: 480VAC
3phase connection type: Star Connection
Voltage Single-phase: 120VAC
Single-phase connection type: Grounded
Frequency: 60Hz
Wattmeter Maker / Model: None
Control Power UPS provided by: Customer
Control Power UPS type: Fab-wide system
UPS Input Voltage / Output Voltage: N/A
Power Cable Input Entrance Location: Power Box Top
FNC - Power Box: 30m
Power Box - RCU: N/A
Power Box - Pump Unit: 30m
Gas Box - Refill System (if used): 30m
Power Box - WVG CTRL Unit (if used): N/A
FNC - WVG CTRL Unit (if used): N/A
Gas Box - Abatement System (if used): N/A
Power Box - Ozone Delivery System (if used): 30m
Power Box - UPS (if used): N/A
Wiring by: Customer
Conduit/Raceways provided by: Customer
Interface Specification
Host Communications: Comply with GJG
Equipment Host I/F Connection: Power Box Top HSMS (10Base-T/100Base-TX)
Ingenio: Yes
OHT Capability: Yes
AGV Capability: None
RGV Capability: None
PGV Capability: None
PIO I/F Location: FNC Top
PIO Provided by: Customer
PIO Maker /Model: Hokuyo / DMS-HB1-Z
Carrier ID Reader Writer Type: RF
CIDRW Load Port: Read
CIDRW FIMS: N/A
CIDRW Maker / Model: Keyence / BL601
CIDRW Provided by: TEL
CIDRW Tag Orientation: None
EEC (Equipment Engineering Capability): None
Customized Management Signals (for WAVES): WAVES
Signal Tower Model: LOUGWB-24-4
Signal Tower Colors (from the Top): Red/Yellow/Green/Blue
Signal Tower Location: Front Panel/FilledcType
Front Operation Panel: None
MMI and Gas FlowChart: Gas Box
Indicator Type: Selete
Operator Switch: Operator Access / White Cover with Orange Light
Pressure Display Unit (Gas Inlet / Vacuum): MPa / Torr
Cabinet Exhaust Pressure Display Unit: Pa
Warning Label: Traditional Chinese
Other Specification
Furnace (Exh/Box,Gas/Box included): Main-Fab
Power Box: Sub-Fab
Pump: Sub-Fab
RCU: N/A
Step Up Transformer: N/A
Step Down Transformer: N/A
Ozone Delivery System: Main-Fab
WVG Controller: N/A
Auto-Refill System: Main-Fab
UPS: None
Other Unit Location: N/A
Gas Leak Detector: Yes
Gas Leak Detector Provided By: TEL
Gas Leak Detector Maker: Riken / GD-K77D-A
Gas Detector Power: 120VAC
Gas/Chem Configuration
MFC A1: Ar Gas Flow [SLM] Full-Scale 10
MFC NA: N2(GB) Gas Flow [SLM] Full-Scale 2
MFC NC: N2(GB) Gas Flow [SLM] Full-Scale 30
MFC NR: N2(GB) Gas Flow [SCCM] Full-Scale 50
MFC N1: N2(GB) Gas Flow [SLM] Full-Scale 50
MFC N2: N2(GB) Gas Flow [SCCM] Full-Scale 500
MFC N3: N2(GB) Gas Flow [SLM] Full-Scale 20
MFC N4: N2(GB) Gas Flow [SCCM] Full-Scale 500
MFC N5: N2(GB) Gas Flow [SLM] Full-Scale 5
MFC N6: N2(GB) Gas Flow [SLM] Full-Scale 1
MFC O2: N2(GB) Gas Flow [SLM] Full-Scale 20
MFC Y1: N2(GB) Gas Flow [SLM] Full-Scale 5
MFC XV1: N2(GB) Gas Flow [SCCM] Full-Scale 500
MFC NL: N2(GB) Gas Flow [SCCM] Full-Scale 1000
MFM_Z1: N2(GB) Gas Flow [SLM] Full-Scale 15
MFC NBS: N2(GB) Gas Flow [SCCM] Full-Scale 400
GEN1N2: O3 GEN_N2 [SCCM] Full-Scale 5
GEN1O2: O3 GEN_O2 [SLM] Full-Scale 30
Heater type : VMM-56-201 4zone / 150-600 (C)
Damage/Missing parts list
Cannibalized- Thermocouple Qty 1
tool sales Exclude Quartz, profile TC, gauge
Please inspect tool to reconfirm
Dry pumps and customer provided items not included on sales
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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