Macquarie Semiconductor and Technology on behalf of Micron Memory Japan, G.K. (F15)

Tokyo Electron Ltd. (TEL) ALPHA-303i Oxide

Asset ID: 207064

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Tokyo Electron Ltd. (TEL)

ALPHA-303i Oxide

Vertical Furnace

Furnaces/Diffusion Systems

Equipment details:

Date of Manufacture: 6/2014

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Hiroshima, Japan

Available date: Currently Available

DIFFUSION - 15-3TEL_A303I_HT - 303I -


Equipment is located in Micron’s cleanroom and is schedule for deinstallation by SP SEMICONDUCTOR. Buyer is responsible for $24,867.00 USD including the 10% tax in de-installation costs payable to Micron. Buyer is also responsible for packaging, crating, loading and shipping


De-installation will be performed by a third party from May 24th to the 28th.

Tool's removal has been scheduled for June 1st, 2021.

No shipping kits will be installed on tool.

Other missing or damaged parts: Not reported.


H2 is not currently used in the tool used in α303-HT.

External torch indicates the cooling water unit, which is not shown on the gas panel.


Tube Material:Quartz Single

Boat Material:SiC with CVD-Coat

Production wafes:50

Process Gas:O2(F.S:31slm),N2(F.S:61slm),Ar(F.S.:30slm)

Water generating Type:External Torch

MFC Maker:HITACHI-Metals

MFC Model:FC-D98series

Process Temp:Max 1150℃

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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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