Macquarie Semiconductor and Technology on behalf of Micron Memory Japan, G.K. (F15)

Kokusai Electric Co., Ltd Zestone-V(B) DJ-1205V

Asset ID: 12679

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Kokusai Electric Co., Ltd

Zestone-V(B) DJ-1205V

Vertical Furnace

Furnaces/Diffusion Systems

Equipment details:

Date of Manufacture: 2003 July

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Hiroshima, Japan

Available date: Currently Available

Tool is operating in clean room.
Shipping brackets and kits will need to be supplied by the buyer.
Labelled as LEASE.

Equipment type: Z-5
Process type: Doped Poly

Process: Doped polysilicon
Heater: Carry
Process Condition: LP
Maximum Operating Temperature(C):850℃
N2 Load Lock:Load lock type N2 substitution
Qty. of Production Wafers: 100
Boat Operation (Handling Position): 1 Boat Type / 1 Boat Operation  (B/E)
Gas(SLM):SiH4(4.000);PH3-1(0.300);N2-1(30.000):N2-2(0.500):N2-3(10.000):N2-4(5.000):N2-5(5.000):LLP-N2(200.000):O2(5.000):Clf3(5.000)
Gas(sccm):PH-2(50.000):PH-3(50.000):PH-4(50.000):PH-5(50.000)

Missing or damaged parts: Not reported. Inspection is recommended to confirm.

 

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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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