Macquarie Semiconductor and Technology on behalf of Micron Memory Japan, G.K. (F15)

Ebara FREX300S Tungsten

Asset ID: 209796

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Ebara

FREX300S Tungsten

Tungsten CMP

CMP Equipment

Equipment details:

Date of Manufacture: 7/2006

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Hiroshima, Japan

Available date: Currently Available

Software Version (include revision #) 8.1 
System Power Rating  AC200V 60Hz 3phase for System 
Loading Configuration  3 load port 
 DescriptionChemicals / Gases Used  
Polisher A    
Chm Line   A_______Slurry line____________________W2000______________  
Chm Line   B_______________________________________________________  
Polisher B    
Chm Line A_______Slurry line____________________W2000______________  
Chm Line B_______Slurry line____________________PL-5106+5501______________  
Polisher C    
Chm Line   A_______Slurry line____________________W2000______________  
Chm Line   B_______________________________________________________  
Polisher D    
Chm Line A_______Slurry line____________________W2000______________  
Chm Line B_______Slurry line____________________PL-5106+5501______________  
Parent CompntPart DescriptionDetailed DescriptionQtyMfg Part
Base SystemFrex 300S4 head 4 platenpolishing system. Dry in Dry out1 
Nova 3090 ReadyInsitu Metrology System0 
Monitor 1 LocationFront of tool1 
Monitor 2 LocationCleaner Side of tool1 
Monitor 3 LocationCart Mounted on Polishing Side of tool1 
Front Light Tower locationLeft Side1 
Rear Light Tower locationRight Side1 
SoftwareHMIHuman / Machine Interface1Version 8.10
Endpoint Simulation SoftwareME-2012.3.50.1
Simulator Software KeyOne Key supplied1 
NOVA Interface softwareVia File Server0 
Factory InterfaceWIP Delivery TypeOHT or manual delivery1 
CarrierShinetsu Foup300E(S206) 1 
E84 PI O Sensors and CablesUPPER E84 Sensors & Cables, with E87 compliance1 
E99 Carrier IDSemi ver 0101041 
Docked E99 Reading CapabilityFOUP Reader1 
Frame ConfigurationMetro ready right side of mini-environment0 
Load Port TypesISO PORTASYST3 
Load Port Operator InterfaceStandard1 
Operator Access SwitchYes1 
Platen APlaten TypeCeramic (SiC), 10-150 RPM1 
Platen PadFor shipment only1 
Platen Pad ConditionerScan Dresser, 4.25" Diamond DR Disc attachment, Screw fixing type1 
Platen End pointRECM & Friction1 
Platen Insitu metrologyInsitu metrology0 
Slurry DeliveryCLC delivery0 
Line 1Injecter + HIC1 
Line 2Injecter + HIC1 
Dresser DIW flow meter.Flow meter1 
Platen Cooling Flow MonitorInstalled on the platen cooling return line.0 
Platen Cooling Temp MonitorTemperature monitor installed on the platen cooling return line.0 
Platen BPlaten TypeCeramic (SiC), 10-150 RPM1 
Platen PadFor shipment only1 
Platen Pad ConditionerScan Dresser, 4.25" Brush Dress, Screw fixing type1 
Platen End pointRECM & Friction0 
Platen Insitu metrologyInsitu metrology0 
Slurry DeliveryCLC delivery0 
Line 1Injecter + HIC1 
Line 2Injecter + HIC1 
Dresser DIW flow meter.Flow meter1 
Platen Cooling Flow MonitorInstalled on the platen cooling return line.0 
Platen Cooling Temp MonitorTemperature monitor installed on the platen cooling return line.0 
Platen CPlaten TypeCeramic (SiC), 10-150 RPM1 
Platen PadFor shipment only1 
Platen Pad ConditionerScan Dresser, 4.25" Diamond DR Disc attachment, Screw fixing type1 
Platen End pointRECM & Friction1 
Platen Insitu metrologyInsitu metrology0 
Slurry DeliveryCLC delivery0 
Line 1Injecter + HIC1 
Line 2Injecter + HIC1 
Dresser DIW flow meter.Flow meter with user configurable alarm settings.1 
Platen Cooling Flow MonitorInstalled on the platen cooling return line.0 
Platen Cooling Temp MonitorTemperature monitor installed on the platen cooling return line.0 
Platen DPlaten TypeCeramic (SiC), 10-150 RPM1 
Platen PadFor shipment only1 
Platen Pad ConditionerScan Dresser, 4.25" Brush Dress, Screw fixing type1 
Platen End pointRECM & Friction0 
Platen Insitu metrologyInsitu metrology0 
Slurry DeliveryCLC delivery0 
Line 1Injecter + HIC1 
Line 2Injecter + HIC1 
Dresser DIW flow meter.Flow meter1 
Platen Cooling Flow MonitorInstalled on the platen cooling return line.0 
Platen Cooling Temp MonitorTemperature monitor installed on the platen cooling return line.0 
PolisherPolisher TechnologySlurry and Pad1 
Polishing Head300mm AI Head Generation 21 
Pad Wafer Loss SensorLaser type1 
Atomizer/Spray BarEbara to provide bracket and atomizer bar.1 
AI head flanges pinsSolid pin1 
Cleaner ModuleSpecial ChemicalSingle chemical bulk line that will service all modules.1 
Cleaner Module 1Roll Roll Cleaner TypeRoll Brush1 
Chemical 1 Upper Control ValveRecipe settable flow1 
Chemical 1 Lower Control ValveRecipe settable flow1 
Chemical 1 Upper Flow MeterUser configurable alarm settings.1 
Chemical 1 Lower Flow MeterUser configurable alarm settings.1 
Special Chemical UpperNeedle valve1 
Special Chemical LowerNeedle valve1 
Special Chemical UpperFlow Meter with user configurable alarm settings.1 
Special Chemical LowerFlow Meter with user configurable alarm settings.1 
MegasonicNozzle1 
Bevel Edge CleaningNo0 
Cleaner Module 2Roll Roll Cleaner TypeRoll Brush1 
Chemical 1 Upper Control ValveRecipe settable flow1 
Chemical 1 Lower Control ValveRecipe settable flow1 
Chemical 1 Upper Flow MeterUser configurable alarm settings.1 
Chemical 1 Lower Flow MeterUser configurable alarm settings.1 
Special Chemical UpperNeedle valve1 
Special Chemical LowerNeedle valve1 
Special Chemical UpperFlow Meter with user configurable alarm settings.1 
Special Chemical LowerFlow Meter with user configurable alarm settings.1 
MegasonicNo0 
Bevel Edge CleaningNo0 
Cleaner Module 3Cleaner TypeRoll Brush1 
Chemical 1 Upper Control ValveRecipe settable flow1 
Chemical 1 Lower Control ValveRecipe settable flow1 
Chemical 1 Upper Flow MeterUser configurable alarm settings.1 
Chemical 1 Lower Flow MeterUser configurable alarm settings.1 
Special Chemical UpperNeedle valve1 
Special Chemical LowerNeedle valve1 
Special Chemical UpperFlow Meter with user configurable alarm settings.1 
Special Chemical LowerFlow Meter with user configurable alarm settings.1 
MegasonicNo0 
Bevel Edge CleaningNo0 
SRDSpin Rinse DryerYes1 
Safety PrecautionsFM4910 Compliant> 97% by weight FM 4910 approved materials of construction.1 
EPOTwist to release1 
Safety labelsEnglish1 
Secondary ContainmentAll mechanical connections1 
FacilitiesInstallation TypeNot through the wall0 
Seismic supportSeismic support points listed1 
Chemical ConnectionBottom1 
Exhaust ConnectionTop1 
Gas ConnectionBottom1 
Drain ConnectionBottom1 
Bulk Supply RegulationPont of use regulation for special chemical supply line.1 
External PenetrationsBulkhead fitting for inert gas1 
External PenetrationsDual containment for liquids1 
MetrologyNova Interface requirementsFunctional interface in include wafer transfer and data exportation to buyer host0 
DocumentationOperations ManualsCD ROM0 
Maintenance ManualsCD ROM0 
Electrical DiagramsCD ROM0 
Plumbing DiagramsCD ROM0 
OEM parts manualsCD ROM0 
DocumentationLaserRequired class II documentation1 
Additional OptionsMetal Contact CountermeasuresAppropriate covers to reduce possibility of enviromental contamination1 


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