Macquarie Semiconductor and Technology on behalf of Qorvo US, Inc.

Brewer Science 1300CSX

Asset ID: 208163

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Brewer Science

1300CSX

Thermal Debonder

Wafer Bonding

Equipment details:

Date of Manufacture:

Currently Configured for: 200mm

Current Equipment Status: Available

Location of Equipment: Farmers Branch, United States

Available date: Currently Available

Brewer Science 1300CSX

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Reference :

Brewer Science® Cee® 1300CSX thermal slide debonder

The Brewer Science® Cee® 1300CSX thermal slide debonder enables hightemperature slide-off debonding of thinned compound semiconductor materials (GaAs, GaN, InP, and SiC) in a laboratory setting. This tool permits engineers to complete the final step of thinned full wafer processing in a developmental setting. Internal small-scale prototyping capability may be used to accelerate product development cycles and improve time to market for new compound semiconductor applications (high-power RF, LED, and solar).

Reliability and Throughput (Data collected with the 1300DB tool platform)

Total Throughput : Est. 8-14 WPH for wafer is ≤ 150 mm in diameter* / Est. 4-8 WPH for wafer is 200-300 mm in diameter

Wafer Breakage : < 10% (≥ 90 Process Yield CS and Si)**

System Uptime : > 90% over a 12-month period

MTBF (hours/cycles) : > 600 hours, 6,000 cycles

MTTR : < 24 hours***

*Throughput performance is dependent on substrate size

** Based on beta site results and >10,000 wafer-pair separations

*** Critical spare parts, as defined by the vendor, to be kept at customer site per Brewer Science field service standard working schedule

Benefits

Design permits in-house debonding of fully processed, proprietary ultrathin device wafers

Enhanced data logging feature provides detailed process feedback and record keeping

PC control allows virtually unlimited log storage

Compact footprint permits installation flexibility

Tool Features

Network connection hardware/software: RJ-45 Ethernet & USB port

Precision lower platen z-position control (closed-loop control/ feedback): ± 5 µm accuracy

Specialized insertion and extraction end effectors with vacuum function (foot pedal control)

Visual and audible light tree alarm

Enhanced light curtain operation for seamless operation

Continue abort override operation for “super user”

Optional exhaust chamber sensor (PC-monitored)

Optional hinged rear and side access panels

Product images

The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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