Macquarie Semiconductor and Technology on behalf of Macquarie (Asia) Pte Ltd. - UMC
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Etch/Ash/Clean - Plasma Processing
Date of Manufacture: 2011-02-14
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Singapore, Singapore
Available date: Currently Available
Inspect to confirm configuration and condition.
General System Info
Date of Audit: 2022/2/14
Fab Equipment ID: CUSTRIP-15
Manufacturer (Make): PSK
Model: FUTAS
Serial Number: PAK10002
Wafer Size (inches): 12
Install Type: TTW
OEM MFG Date: 2011/2/14
Install Date: 2012/03
Date of Last PM: NA
Is System On-Line? No
Off-Line Date (if applicable): 2018
Can Produce Wafers As-Is? No
CE Mark Certified? Yes
Are any Manuals included? Std / CR
OEM Audit Available? Yes
3rd Party Audit Available? Yes
Decontamination Report Exists? Yes
Overall Tool Condition
Any Field Modifications? Yes
All Cables present? Yes
Any Corrosion visible on modules? Yes
Any Missing / Damaged Parts? Yes
Shipping Brackets Included? Yes
Wafer Handler: Yes
# of Cassette / FOUP Loaders: 3
Robot Type: RORZE
End-Effecter Type: CLAMP
Pre-Aligner? No
Mini-Environment: Yes
Handler Options? No
System Software
System SW (OS) version: Windows XP
System SW (App) version: PAK10002
Log-In Username: PSK
Log-In Password: PSK
Any SW Options? NA
SEMI Std Options: E84
Supporting Equipment
Power Supply: 208V 3P4W
AC Dist Box: 3
Ext Transformer: NA
UPS: NA
Heat Exchanger / Chiller: NA
Backing Pump(s): 3
Facility Requirements
CDA: 7-8 Kg/cm2
DIW: NA
Vacuum: -80Kpa
Gas: N2 / H2/ 5%H2He
Power: 208V 3P4W
Damage/Missing parts list
Please inspect tool to reconfirm
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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