P.S.K. Tech Inc. FUTAS

Equipment details:

Date of Manufacture: 2011/2/14

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Singapore, Singapore

Available date: Currently Available

Inspect to confirm configuration and condition.

General System Info

Date of Audit: 2022/2/14

Fab Equipment ID: CUSTRIP-15

Manufacturer (Make): PSK

Model: FUTAS

Serial Number: PAK10002

Wafer Size (inches): 12

Install Type: TTW

OEM MFG Date: 2011/2/14

Install Date: 2012/03

Date of Last PM: NA

Is System On-Line? No

Off-Line Date (if applicable): 2018

Can Produce Wafers As-Is? No

CE Mark Certified? Yes

Are any Manuals included? Std / CR

OEM Audit Available? Yes

3^rd Party Audit Available? Yes

Decontamination Report Exists? Yes

Overall Tool Condition

Any Field Modifications? Yes

All Cables present? Yes

Any Corrosion visible on modules? Yes

Any Missing / Damaged Parts? Yes

Shipping Brackets Included? Yes

Wafer Handler: Yes

# of Cassette / FOUP Loaders: 3

Robot Type: RORZE

End-Effecter Type: CLAMP

Pre-Aligner? No

Mini-Environment: Yes

Handler Options? No

System Software

System SW (OS) version: Windows XP

System SW (App) version: PAK10002

Log-In Username: PSK

Log-In Password: PSK

Any SW Options? NA

SEMI Std Options: E84

Supporting Equipment

Power Supply: 208V 3P4W

AC Dist Box: 3

Ext Transformer: NA

UPS: NA

Heat Exchanger / Chiller: NA

Backing Pump(s): 3

Facility Requirements

CDA: 7-8 Kg/cm2

DIW: NA

Vacuum: -80Kpa

Gas: N2 / H2/ 5%H2He

Power: 208V 3P4W

Damage/Missing parts list

Please inspect tool to reconfirm