Macquarie Semiconductor and Technology on behalf of Macquarie (Asia) Pte Ltd. Taiwan Branch - UMC

SEZ Group SP203

Asset ID: 210178

Print spec sheet

SEZ Group

SP203

Single Wafer Processing

Etch/Clean - Wet Processing

Equipment details:

Date of Manufacture:

Currently Configured for: 200mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Hsinchu 300, Taiwan

Available date: Currently Available



Install Date is 2010Y

Date of last PM is 2020Y

The system is On-Line

The equipment can produce Wafers As-Is

SEZ Spin Processor Model is SP203

Main Frame Software Version is 114 (19.07.2001)

UI (Front) is present 

UI (Rear) not Present 

Chuck Size (Left) is 8"

Chuck Size (Right) is 8"

Ionizer system

ULPA Filter (Top of Main Unit)

No Flip Module

No End Point Detection System

No Horiba concentration Monitor (HF Monitor)

No Heat Exchanger #1 (std)

No Heat Exchanger #2 (for control up to 65°C)

Number of Load-ports is 2 std

Load-port Size (Left)is 8

Load-port Size (Right) is 8

Load-port Adapters is 8

No Wafer ID Reader

No RFID Reader

No AGV 

No Ozone Module

No Transformer

Supporting Equipment / Sub-Fab

Power Distribution Box (PDB)

All Cables Present are present


Chemical Config Chemicals

Chemical Module 1 is DI

Chemical Module 2 is EMPTY

Chemical Module 3 is N/A


No Bulk Chem Delivery system (BCD)_Active

No Bulk Chem Delivery system (BCD)_Passive


Damaged parts: SMIF #A


Comments:

1. The main unit has not been powered off yet, and all functions are normal. Due to the use of normal temperature, there is no 2.3 KW Heating module installed.

2. The machine only uses Medium#3, and the function is normal at present. The tank is DI Water. The chemical pipeline has been separated for many years.

3. SMIF#A is abnormal to be repaired, SMIF#B can be used normally.

4. Another CDS Medium is not installed (it must be used for Overhaul), and there are only 2 Mediums (both configured with Mix tank) since the machine was moved.

5. The CDS Cabinet that is not installed lacks the Process pump (PS-20MA) and the solenoid valve drive module of the Pump.

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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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