Macquarie Semiconductor and Technology on behalf of Macquarie (Asia) Pte Ltd. Taiwan Branch - UMC
Date of Manufacture: 2006
Currently Configured for: 300mm
Current Equipment Status: Available
Location of Equipment: Tainan 744, Taiwan
Available date: Currently Available
Inspect to confirm configuration and condition.
The robot and PC are missing.
Software Version is LT Release Version 126.96.36.199.
Date of Last PM is 2013.
Off-Line Date is 2013.
Platform Type is Raider SP.
Robot Type is SEMITOOL.
Polisher Skins (Window) is Clear.
Chamber 1~10 Process Format is Capsule.
Factory Interface: OHT WIP Delivery P
E84 PI O Sensor and Cables P
OHT Light Curtain P
Carrier ID Host Cntr Interface P
ULPA Filter P
E78 Ionizer P
FOUP Load Port is 25-Wafer LP w/o Manual Switch.
Factory Interface Frame is 4 Wide.
FOUP Loader Type is semitool.
Electrical Requirements: Electrical Feed(Top)
Cleaner Drain Manifold:3 Lines
Exhaust is Bottom.
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