Macquarie Semiconductor and Technology on behalf of Micron Memory Japan, G.K. (F15)

Hitachi (Semiconductor) CG4000

Asset ID: 195212

Print spec sheet

Hitachi (Semiconductor)

CG4000

SEM

Metrology Equipment

Equipment details:

Date of Manufacture: TBC

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Hiroshima, Japan

Available date: Currently Available

Tool has been de-installed and is stored in an off-site warehouse. No pictures provided. Please inspect to collect photos.

Missing or damaged parts: Fab15 confirmed there were no missing or damaged parts.


SYSTEM CONFIGURATION:


SOFTWARE VERSION33.1D (VID753)
General DescriptionCapable of processing 300mm +/- 0.05mm (SEMI M28),
775 +/- 25um, notched wafers
General Description 2 FOUP
General Description2 FOUP (Continuous flow operation). With Semi compliant MENV and FIMS assemblies.
Fixed System ConfigurationTigris compatible RFID
Fixed System ConfigurationSECS-II GEM+; HSMS 300mm
Fixed System ConfigurationDisplay and Main Unit (including attached Mini-environment) have front and back EMO, but PS Unit has only front EMO.
Fixed System ConfigurationPower Supply Unit and Mini-environment have panel (cover) interlocks.
Customer Options That Must Be Called OutBallroom or bulkhead installation
Customer Options That Must Be Called Out4 cables run between the display unit and the main unit.
Customer Options That Must Be Called OutRed/Yellow/Green
Customer Options That Must Be Called OutHardware related to EDA.
Supporting Remote UnitsESR20N vacuum pumps (qty-2). 
Supporting Remote UnitsTool Interface Module
Supporting Remote UnitsTerminal PC:
TPC Lite Package which consists of transfer software and data processing software.
Supporting Remote UnitsProvides backup/restore/trace/distribution functions
Supporting Remote UnitsOffline recipe editor
Supporting Remote UnitsVID Pad
Supporting Remote UnitsPreShip Kit
Supporting Remote UnitsPreShip Kit
Supporting Remote UnitsVacuum block assembly
Supporting Remote UnitsBase
Installation RequirementsBulk Gas
Installation RequirementsBulk Gas
Installation RequirementsBulk Gas
Installation RequirementsElectric
Installation RequirementsElectric
Installation RequirementsChiller
Installation RequirementsExhaust
SafetySafety Codes
Doc/Miscmanuals


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