Macquarie Equipment Trading on behalf of Macquarie Finance Korea Co., Ltd. 3237

LAM Research 2300e5 KIYO 45

Asset ID: 10354

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LAM Research

2300e5 KIYO 45

Polysilicon Etch

Etch/Ash/Clean - Plasma Processing

Equipment details:

Date of Manufacture:

Currently Configured for: 300mm

Current Equipment Status: Available

Location of Equipment: Gyeonggi-do,, Korea, Republic of

Available date: Currently Available

  1. 2300e5 Platform 
  2. 4* 2300 Versys Kiyo45 PTK PM, 300mm
  3. 2300 Strip45 PM 
  4. 2300 PLATFORM (E) 
    1. 3 FOUP TDK 
    2. 3* Hermos Carrier ID 
    3. Light Curtain w/ OHT/RGV 
    4. 25 Slot Input Buffer Station 
    5. 25 Slot Aux Buffer (Corr Res) NSR101271,lnput buffer 
    6. anti-corrosion 
    7. NSR101435,TM UPS bypass kit with Maratho 
    8. Conditioning Station (7 Wafer) User Interface: Side and Front Monitor U 
    9. System UPS Circuitry 
    10. Earth Leakage Breaker 
    11. Cable: TM-Subpanel, 100ft 
    12. Signal Light Tower, R-O-G-B Slim Line 
    13. Sys Calibration and Alignment Software Variable ID 
    14. ATM Differential Pressure 
    15. APCS 
    16. VTM Breakout Board/Cover 
    17. Light Tower Buzzer 
    18. NSR9397, Female connectors for OHT 
    19. NSR10702, N2 Flow Monitoring on UPC 
    20. Metric to Inch Conv. Fittings 
    21. VTM Pump: Edwards (EPX)
    22. NSR9943, Vespel for Airlock
    23. NSR100972, SST Gas Filter
    24. Vespel Single Sense 
  5. 2300 PROCESS MODULE
  6. 4* 2300 VERSYS KIYO45 OPTIONS
    1. 4* ESC Hose Kit: Low Temp with Shaft Seal 
      1. 4* NSR6205, 3/4" swagelock connection 
    2. 4* OES Plus 
    3. 4* Sym. Liner Door (Improved) 2700 I/s BOCE Turbo Pump Chamber Manometer: Alternate (-011) 
    4. 4* NSR101186, 18ft TCP RF Cable on Kiyo45 
    5. 4* NSR10013, Kiyo45 Particle Reduction 
  7. 2300 STRIP45 OPTIONS
  8. 1* OES Endpoint Option
    1. 1* Stainless Steel w/ 5/8 -1/2 Reducer 
      1. 1* Versys Kiyo45 Quick Clean kit
  9. 2300 GAS BOX
  10. 2300 VERSYS KIYO45 JETSTREAM GAS BOX
    1. *4 9 Gas Configuration (JetStream) 
      1. 4*Gas System: PM Versys Kiyo45 NSR 1 
      2. 1* Facility Interface Box (System)
      3. 16* Facility Interface Box (Per Line) 
      4. 1* Future PM Containment 
    2. 28*Jetstream Gas Line 
    3. 8*Heated Gas Line 
    4. 4*Non Standard MFC 
  11. 2300 PERIPHERALS
    1. 5* Cust. Supply: Non-Qual Pump
    2. 4* Cust. Supply: Non-Qual TCU 


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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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