Equipment details:
Date of Manufacture:
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Taoyuan, Taiwan
Available date: Currently Available
Process: NIT
Configured with 3 chambers
Technology: PECVD
Platform Type: PRODUCER SE
System Software
System software: B2.8_27
FiCGUI: fB4.40_19
GP: gB7.00_20
DTauMacros: 5.1.12.0
Chamber Configuration
Chamber Type: PECVD
Lid: none micrometers
Lid Mixing Insert: no use
Liner: NA
Blocker: 0020-70842
Faceplate: 0020-84596
NDIR Endpoint Detector: No
Heater: Heater ASSY, HA12, MC, CIP
Slit Valve: Valqua
Isolation Valve: 3870-03210
Throttle Valve: 0190-19203
Heater Lift Driver: 0190-13840
RPS: 0920-00013
Gas Box Configuration: surface mount TYPE FOR MFC
Gas Line 1: SiH4 Lo 0.5SLM
Gas Line 2: SiH4 2SLM
Gas Line 3: B2H6 4SLM
Gas Line 4: H2 2SLM
Gas Line 5: NF3 5SLM
Gas Line 6: NH3 0.7SLM
Gas Line 7: HE 15SLM
Gas Line 8: AR 10SLM
Gas Line 9: empty
Gas Line 10: N2O Hi 15SLM
Gas Line 11: N2O Lo 2SLM
Gas Line 12: N2 25SLM
Gas Line 13: empty
Gas Line 14: empty
Gas Line 15: empty
Gas Line 16: empty
Liquid 1: empty
Liquid 2: empty
Liquid 3: empty
Injector-TEB: empty
Injector-TEPO: empty
Injector-TEOS: empty
Process Pump/Abatement
BOC Edwards: Alcatel ADS1202H
Ozone Rack Cooling: N/A
Kit Parts:
BLOCKER PLATE: 0020-70842
FACE PLATE: 0020-84596
GASBOX: 0040-86768
TOP CERAMIC LINER: 0200-02395
MIDDLE CERAMIC LINER: 0200-02396
BOTTOM CERAMIC LINER: 0200-02397
ALUMINUM PUMPING RING: 0200-02407/0200-02408
VACUUM CHUCK HEATER ASSY: 0010-24301
LIFT PINS: 0200-03270
LIFT RING Captive 300MM PRODUCER SE: N/A
LIFT HOOP: 0200-01991
ISOLATOR: 0200-04235
LIFT RING SCREW: 0021-26158
ISO VALVE: 0190-08201
THROTTLE VALVE: 0190-12708
Abatement System
Model: 4xinlet
Vendor: DAS
Heat wrap: 150
Heat Exchanger
Model: H2000
Vendor: SMC Thermo Chiller
Process Chamber Pump
Vendor: BOC Edwards
Heater Jacket @foreline: Yes
Heater Jacket @ exhaust to scrubber: Yes
Missing/Damaged Parts List
None report, please inspect tool to reconfirm
Dry pumps not included
