MKS Instruments AX8575-10

Equipment details:

Date of Manufacture:

Currently Configured for: N/A

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan, Taiwan

Available date: Currently Available

Qty- 14

was connected with TEL INDY 

The AX8575 SEMOZON® is a fully integrated, high output ozone gas delivery system that can be configured as a multi-channel system delivering ozone for up to 4 channels supporting multiple chambers or multiple tools. It has an optional in-rack chiller for ultra-high concentrations. The SEMOZON® AX8575 Ozone Delivery System is specifically designed for applications such as ALD, CVD, TEOS/Ozone CVD, photoresist strip, wafer cleaning, contaminant removal, and oxide growth.

Technical Specs

• Type
• Ozone Gas Delivery System
• Ozone Output
• 350g/Nm3
• Flow Rate
• 40 slm
• Feed Gas
• Oxygen, Nitrogen (20 - 100 ppm of total flow)
• Feed Gas Supply Pressure
• 50 psig (3.5 kg/cm2) nominal, 60 psig (4.2 kg/cm2) maximum, N2 pressure 10 psi higher than O2 pressure
• Feed Gas Purity
• 99.9995% minimum
• Operating Temperature
• 41 - 104°F (5 - 40°C)
• Cooling Water Temperature Required
• 12 - 21°C with chiller, 5 - 17°C without chiller
• Cooling Water Filtration Required
• 100 micron Filtration PWC (with chiller)
• Cooling Water Quality Required
• 1 - 3 MOhm DI, Note: Max DI water/Glycol blend: 70/30
• Cooling Water Minimum Flow Required
• 10 gpm nominal (water modulating valve range: 2 - 10 gpm) with chiller, 2.5 gpm per Generator (configuration dependant) without chiller
• Cooling Water Connections Required
• 1 in. compression (Swagelok®)
• Cooling Water Heat Load Required
• 10 kw (based on two generator configuration) with chiller, 5 kw per generator without chiller
• Voltage Requirements
• 208 volts AC (±10%), three phase
• Current Requirements
• 31 Amps RMS, 50 Amps service (depending on configuration) minimum of 10,000 A.I.C, 60 Amps service with chiller
• Frequency
• 50/60 Hz
• Exhaust Flow Rate
• 150 cfm (70.8 l/s)
• Exhaust Type
• SEMI Category 4 (accidental or emergency release of hazardous gas or vapor)
• Exhaust Static Pressure
• 0.10 in. (2.54 mm) H2O minimum, measured at the bottom of the duct flange adapter on cabinet
• Control Air Pressure
• 70 - 100 psig
• Control Air Type
• CDA or dry nitrogen, 40µm filtered
• Control Air Fitting
• 1/4 in. compression (Swagelok®)
• Exhaust Connection
• 6 in. diameter duct opening or 4 in. diameter duct opening
• Dimensions
• 24 x 75 x 36 in. (610 mm x 1575 mm x 914 mm) (width x height x depth)
• Relative Humidity
• 30 - 90% (non - condensing)
• Weight
• 600 lbs.(272 kg) for system with one generator, 880 lbs.(400 kg) for system with four generators, 1100 lbs. (499 kg) for system with two generators and internal chiller
• Compliance
• CE, S2 - 0302, F47
• Altitude
• Up to 3280 feet (1000 m) above mean sea level