Macquarie Equipment Trading on behalf of Micron Technology Utah, LLC

Applied Materials Reflexion LK

Asset ID: 207522

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Applied Materials

Reflexion LK

Multi-Process CMP

CMP Equipment

Equipment details:

Date of Manufacture: 2007

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Lehi, United States

Available date: Currently Available

Vendor Tool Serial #413777 
Date of Tool Move-In4-Oct-07 
Tool Availability Date  
Tool Current StatusIn production  
Tool working conditionWorking  
Tool ModelReflection LK 
ProcessBPSG 
Software Versionlp384.8_52 
System Power Rating 208v 3 Ø 60Hz(eg. 110 AC 3-Phase for System)
Loading Configuration3 load ports(eg. 6 load positions for furnace or dual auto-indexer loaders)
Chm Position   1Slurry A 
Chm Position   2Slurry Bnone
Chm Position   3Slurry Cnone
Chm Position   4Slurry Dnone
Chm Position ___Brush Box1 Chem 1TMAH 0.063
Chm Position ___Brush Box2 Chem 1TMAH 0.063
Polisher - 3 platens  
Polisher - 4 heads (head 4 rotation is non-functional) 
Dry Metrology 3090   
Cleaner - Runing Beam  
Cleaner Modules - Input Buffer, Megasonics, 2 brush Boxes, Desica Marangoni Dryer


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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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