Macquarie Semiconductor and Technology on behalf of Macquarie (Asia) Pte Ltd. Taiwan Branch - UMC
Date of Manufacture: 1999
Currently Configured for: 200mm
Current Equipment Status: Available
Location of Equipment: Hsinchu, Taiwan
Available date: Currently Available
Inspect to confirm configuration and condition.
Software Type is Lam Envision.
All the cables are present.
Etcher mainframe type is Rainbow.
The Electrostatic Chuck / Signal Lamp Tower / Built-In SMIF / Endpoint Detection System are include.
The Equipment Rainbow Mainframe include Autoloader / Built-In Hepa Filter / Orbitally Welded Gas Box / Backside Helium Cooling / Heated Pumping Manifolds / On-Board RF Generators / Remote RF Cart / Remote Gas Box / Remote Operator Interface / Remote AC Box / Atmospheric Passivation Module / High Condctance Manifold.
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