Macquarie Semiconductor and Technology on behalf of IBM Corporation

Nikon NSR-2005i8A

Asset ID: 211140

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Nikon

NSR-2005i8A

i-Line Stepper

Lithography Equipment

Equipment details:

Date of Manufacture: 1992

Currently Configured for: 200mm

Current Equipment Status: Available

Location of Equipment: Poughkeepsie, United States

Available date: Currently Available

NSR i8a

Uses 2000W HBO lamps

200 mm wafers

 

Multiple stage parts replaced in 2018

Cameras replaced in 2018

Pneumatic unit replaced in 2018 with Nikon OEM part and a lot of the vacuum tubing throughout the tool was replaced

Reticle blinds unit replaced with Nikon OEM part in 2017

Lamp power supply replaced in 2017

New Nikon computer in 2020

CCU NVC6B-U with modules replaced in 2020


      

     Condition of item: Good

     Type of product processed through this tool: 200mm wafers, 6” x 6” 5X reticles

     Has equipment been cannibalized (Y/N): NO

           If Yes, please advise what has been removed: chuck chiller

     Has equipment been modified : (Y/N): Y

           If Yes, can it be restored? No

 

Name of Software                               Made By

           Nest Operating System               ____Nikon___

 

Software is NOT transferred with the tool

 

Are there operating/maintenance manuals available? Yes

 

           List all available:

           NSR/MCSII System Software Reference Manual

           NSR-2005 G8/I8 Series System Manual Part 1 and Part 2

           NSR/MCSII Series Operational Manual Part 1 and Part 2

           NSR/MCSII Series Operational Manual Part 3

           AMS (MMP) Instructional Manual/MCSII Maintenance Software

           Laser Interferometric Alignment (LIA) Overview and Operation Manual

           Wafer Loader Description and Error Handling Procedure

           Weighted EGA Instruction Manual

           NIKON-DP (Expanded-Focus Exposure) Instruction Manual

           Test Reticle Instruction Manual

           Multi-Point Auto Focus Instruction Manual

           Test Process Program Overview


Stage Information

   Number Of Stage Axis: X,Y,Z

 

   Is The Stage Automated Or Manual: __Automated__

   Does The Stage Have Vacuum: (Y / N) __Y__

   Is The Stage Heated: (Y / N) __N_____

   Heat Controller Model: ___N/A__

 

Vision System Information

Are camera(s) classified under the ITAR? No

 

   Camera Model: __ CCU NVC6B-U __

   Number Of Cameras On The Tool: ___2___

   Cameras: Black & White

  

   Monitor: Black & White              

 

Laser Information

  Laser Model: < 1mW He-Ne laser

  Laser Class: __II_

  Has A Recent Safety Check Been Conducted: No

           

Facilities Required To Run The Tool

   Voltage: 208V

   Hertz: 50/60 Hz

   Phase: 3

   Power: full load current: 40A, ampere rating of largest motor or load: 12A

   Short circuit interrupting capacity: 22 KA

   Vacuum: YES                                       

   Air: compressed air                                     

   Gases: _compressed air

   Chemicals: __Freon-22 and Suniso 3GS Refrigeration Oil

   Water: Non-contact cooling water

 

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Product Images

The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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