Macquarie Semiconductor and Technology on behalf of IBM Corporation
Date of Manufacture: 1992
Currently Configured for: 200mm
Current Equipment Status: Available
Location of Equipment: Poughkeepsie, United States
Available date: Currently Available
NSR i8a
Uses 2000W HBO lamps
200 mm wafers
Multiple stage parts replaced in 2018
Cameras replaced in 2018
Pneumatic unit replaced in 2018 with Nikon OEM part and a lot of the vacuum tubing throughout the tool was replaced
Reticle blinds unit replaced with Nikon OEM part in 2017
Lamp power supply replaced in 2017
New Nikon computer in 2020
CCU NVC6B-U with modules replaced in 2020
Condition of item: Good
Type of product processed through this tool: 200mm wafers, 6” x 6” 5X reticles
Has equipment been cannibalized (Y/N): NO
If Yes, please advise what has been removed: chuck chiller
Has equipment been modified : (Y/N): Y
If Yes, can it be restored? No
Name of Software Made By
Nest Operating System ____Nikon___
Software is NOT transferred with the tool
Are there operating/maintenance manuals available? Yes
List all available:
NSR/MCSII System Software Reference Manual
NSR-2005 G8/I8 Series System Manual Part 1 and Part 2
NSR/MCSII Series Operational Manual Part 1 and Part 2
NSR/MCSII Series Operational Manual Part 3
AMS (MMP) Instructional Manual/MCSII Maintenance Software
Laser Interferometric Alignment (LIA) Overview and Operation Manual
Wafer Loader Description and Error Handling Procedure
Weighted EGA Instruction Manual
NIKON-DP (Expanded-Focus Exposure) Instruction Manual
Test Reticle Instruction Manual
Multi-Point Auto Focus Instruction Manual
Test Process Program Overview
Stage Information
Number Of Stage Axis: X,Y,Z
Is The Stage Automated Or Manual: __Automated__
Does The Stage Have Vacuum: (Y / N) __Y__
Is The Stage Heated: (Y / N) __N_____
Heat Controller Model: ___N/A__
Vision System Information
Are camera(s) classified under the ITAR? No
Camera Model: __ CCU NVC6B-U __
Number Of Cameras On The Tool: ___2___
Cameras: Black & White
Monitor: Black & White
Laser Information
Laser Model: < 1mW He-Ne laser
Laser Class: __II_
Has A Recent Safety Check Been Conducted: No
Facilities Required To Run The Tool
Voltage: 208V
Hertz: 50/60 Hz
Phase: 3
Power: full load current: 40A, ampere rating of largest motor or load: 12A
Short circuit interrupting capacity: 22 KA
Vacuum: YES
Air: compressed air
Gases: _compressed air
Chemicals: __Freon-22 and Suniso 3GS Refrigeration Oil
Water: Non-contact cooling water
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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