Macquarie Semiconductor and Technology on behalf of Macquarie (Asia) Pte Ltd. Taiwan Branch - UMC

Tokyo Electron Ltd. (TEL) Unity Me 85 SCCM

Asset ID: 209870

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Tokyo Electron Ltd. (TEL)

Unity Me 85 SCCM

Dielectric Etch

Etch/Ash/Clean - Plasma Processing

Equipment details:

Date of Manufacture: July 2004

Currently Configured for: 200mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Hsinchu, Taiwan

Available date: Currently Available

The equipment has been disassembled, please inspection the equipment to confirm the configuration and condition.


Manufacturer:Tokyo Electron Ltd. (TEL)

Model:UNITY ME 8555SSS


Install Type: SMIF

Software Version:Version 2.08-rev404-gem-5.54f

The system not On-Line.

All Cables are Present.

Etcher Mainframe Type is Unity Me.

Process Chamber (P/C)* 3

Directory of Etch Chamber Process is Oxide Etch.

Electrostatic Chuck:Include 

Electrostatic Chuck Type is Ceramic

Chamber Process Kit Material is Quartz & Cerramic

Signal Lamp Tower:Include 

Remote Service Monitors:Include 


Process Kit Item(Part Number)

U/E(ES1810-121923-11)

ESC(ES1D85-010783-13)

SHIELD RING(ES1805-220177-11)

F/R(ES1810-329156-11)

INNER RING(ES1805-320110-21)

COVER RING(ES1805-320109-11)

BASE RING(ES1805-320139-11)

RING EXT OUTER(ES1805-220135-13)

Turbo Pump Details:EDWARDS A803

RF/Microwave Generator Details

Chamber Position    Mfgr.  Model

Position 1 – Lower RF    DAIHEN  WMN-30F

Position 1 – Upper RF (SCCM) DAIHEN  AMN-30C11

Position 2 – Lower RF    DAIHEN  WMN-30F

Position 2 – Upper RF (SCCM) DAIHEN  AMN-30C11

Position 3 – Lower RF    DAIHEN  WMN-30F

Position 3 – Upper RF (SCCM) DAIHEN  AMN-30C11


Gas Box Configuration

Gas Line # Gas Flow (sccm) MFC Mfgr. MFC Model

1 H2 1000 崇翌科技 SEC-Z512MGXC

2 C4F8 30 崇翌科技 SEC-Z512MGXC

3 AR 100 崇翌科技 SEC-Z512MGXC

4 CF4 100 崇翌科技 SEC-Z512MGXC

5 CHF3 100 崇翌科技 SEC-Z512MGXC

6 CH2F2 30 崇翌科技 SEC-Z512MGXC

7 CO 150 崇翌科技 SEC-Z512MGXC

8 AR 1000 崇翌科技 SEC-Z512MGXC

9 O2 30 崇翌科技 SEC-Z512MGXC

10 O2 1000 崇翌科技 SEC-Z512MGXC

11 N2 300 崇翌科技 SEC-Z512MGXC

12 HE 1000 崇翌科技 SEC-Z512MGXC


Missing Parts for known

1.Bolt-On-SMIF

2.Chiller

3.Dry pump

4.P1 top generator

5.Clean Room Manuals 

6.Standard Manuals

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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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