Macquarie Equipment Trading on behalf of Micron Memory Japan, G.K. (F15)
Date of Manufacture:
Currently Configured for: 300mm
Current Equipment Status: Available
Location of Equipment: Hiroshima, Japan
Available date: Currently Available
(1 Chamber); Process OX. It has been removed from tool and is stored in clean room.
1 CHAMBER ONLY.
|Tool Model||Vigus RK3|
|System Power Rating||200VAC 3-Phase|
|Chm Position 1||TACTRAS Vigus RK3||Ar/H2/C4F8/O2/CF4/CHF3/CH2F2/CO/N2/C4F6/COS|
CONFIGURATION AVAILABLE: Please ask your sale person.
No missing parts reported.
Shipping wheels will be needed for rigging out of clean room. Please inspect to confirm.
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