Macquarie Semiconductor and Technology on behalf of Micron Memory Taiwan Co., Ltd. (F16)
Etch/Ash/Clean - Plasma Processing
Date of Manufacture: Jun 11, 2003
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Taichung City, Taiwan
Available date: 4/30/2021
Tool config is based on original PO, please verify tool details at tool inspection
Tool is configed with 2 chambers
Standard Specifications
Software Revision: Linux 6.75 Rev 000-VSTD6.75a
Lot Stability Dummy SW: Software for running lot stability wafer.
OEE WPH Software: SW only for OEE throughput upgrade.
GEM SEC Revision: TBD
Wafer Size: Diameter 300+/- 0.20mm(SEMI M1.15), Notch
Carrier: FOUP (Comply with SEMI E47.1 (25wafers))
Inter Face: 3 carrier stage (Continuous flow operation) with Semi compliant MENV and FIMS assemblies
Online Connection: GEM / CIM GJG (Hardware Interface : Ethernet 100Base-Tx)
"Interface A: GEM/CIM GJG
Hardware interface : Ethernet 100Base-Tx"
Utility Box: Regulator : Air/AR2500(SMC), N2/SQ-420E(VERIFLO), He/SQMICRO(VERIFLO)
Utility Box: Manual Valve : OGD20V-6RM-K / OGD10V-4RM-K (CKD)
Utility Box: Pressure Gauge : Bourdon Gauge
Loader Mod Corrosion Prevent: SUS Parts, Ball screw & Liner guide : PTFE Coating
Load Lock Pressure Monitor: Pressure Switch : VSA100A (INFICON)
Load Lock Pressure Monitor: Pirani gauge : TTR211S LEYBOLD)
Load Lock Pressure Monitor: CM : 626A01TDE (MKS)
Maintenance Monitor: 2 (Flat Panel Display Touch Screen Type)
Water Leak Detector: 4 (LM;1, each PS;1)
Signal Tower: Red/Yellow/Green/ (Upper Left of Front x1 & Upper right section of loader on maintenance side x1)
Data Back up: MO drive
EMO: Front x1, Rear x3
Cable Length: 12m (Interconnection), 16m (Top RF cables),15m(Btm RF cables)
Inter Locks: External (When the I/L signal is received from Factory, gas valves are closed)
Fittings: Standard
Supporting Remote Units
"Chiller: Daikin UBRPD5B-2T2
* stopped production"
Coolant: Lower:FC3283, Upper:FC40
Chiller Hose: BRINE HOSE 12/11M
Handy Maintenance Controller: LCD DISPLAY UT3-TLN21-A
RF Generator TOP: AGA-50B2
RF Matcher TOP: AMN-50B2
RF Generator Bottom: WGA-50E
Matching Controller: WMN-50H6(2MHZ/5KW)(PS3)
Pen Record Box: 2L80-00212-12
Loader Module: SELME2112ZS22-AD5
LOAD PORT: SELOP12F25-30U-14
DRIVE UNIT: SBX92102928
READER OPTICAL: ISS-1700-1TELCC
Carrier ID Reader: KEYENCE BL-601 HAC1-SO
APC: 10 INCH (250MM)
Hardware Configuration
Proc Chbr 1,2: SCCM Oxide; Y203 Coating
Chamber hardware: FCC
Endpoint type: SE2000ii
ESC type: ELECTRODE BTM,H2 T4 12YG L
Focus ring: 3.4mm
Thunderwall He Gas Inlet: Ceramic Thunderwall with Ceramic pusher pins.
Polished focus ring: None
FC lower insulator: INSULATOR,LOWER (RE)
Magnet Shield: None
Oring for Chbr Body-Depos: Armorcrystal
CEL Body ASSY: Upper electrode constant temperature control
"TMP: FT-3301
(MITSUBISHI)"
TMP Back Pressure Monitor: 51A11TGA2BA003 (MKS)
Dry Pump: MU300(KASHIYAMA) Customer Supply
Final Valve, Heater: Valve; AGD21V-6RM-GWL4 (CKD)
Filter: Filter; CEP-TM_HL-VR-03PB (Toshiba Ceramic)
APC: 10 INCH (250MM)
Pressure Monitor: C/M (Process Monitor) : 627BRETDD2P (MKS), 45deg, 30Pa
Pressure Monitor: C/M (Self Check) : 627B11TDC2P (MKS), 45deg, 1330Pa
Pressure Monitor: B.A. Gauge (CM Calibration) : BPG400 (INFICON), 2.0x10-5 ~ 0.1Pa
Pressure Monitor: ATM Switch : 41B13DGA2AA040 (MKS)
Pressure Monitor: Pressure Switch : 51A11TGA2BA010 (MKS), H2/fluoro gas
Gas Box Configuration
Gas Line 1: Gasline-1 Ar FCSDN-4WS-798-F1600
Gas Line 2: Gasline-2 C4F6 FCSDN-WR-4WS-798-F122B
Gas Line 3: Gasline-3 C4F8 FCSDN-WR-4WS-798-F122B
Gas Line 4: Gasline-4 C5F8 FCSDN-WR-4WS-798-F115A
Gas Line 5: Gasline-4 C5F8 FCSDN-WR-4WS-798-F200A
Gas Line 6: Gasline-6 Xe FCSDN-WR-4WS-798-F1L
Gas Line 7: Gasline-7 O2 FCSDN-4WS-798-F65
Gas Line 8: Gasline-8 O2 FCSDN-4WS-798-F600
Gas Line 9: Gasline-9 CF4 FCSDN-4WS-798-F260
Gas Line 10: Gasline-10 CHF3 FCSDN-4WS-798-F260
Gas Line 11: Gasline-11 CH2F2 FCSDN-4WS-798-F80
Gas Line 12: CAP
Purge: N2 (Process Grade N2)
Filter: CNF1004USG4 (Nihon Pall)
"Regulator: SQMICRO (VERIFLO)
12-1A01IGS2W1.54"
Filter (N2): SQMICRO (VERIFLO)
Valve: Primary side(Utility-MFC):Mega mini (FUJIKIN)
Valve: Secondary side(MFC-PC):Mega one (FUJIKIN)
Piping: Dual Piping (for Gas leak containment, Gas box to Final valve & Exhaust through Gas box)
Gas Leak Detection Port: 5 Ports (6.35mm, Swagelok L-type)
Final Pressure Switch: 51A (MKS)
Pressure Gauge: Bourdon Gauge (with inside finishing)
Pressure Gauge: Bourdon Gauge (with inside finishing) 0.4MPa
SP3 Gas Line Connection: Single Line Drop
GBROR: GBROR
Process Kit Configuration
WINDOW, SHIELD DEPO(DRM2) QRTZ: WINDOW, SHIELD DEPO (DRM2) QUARTZ
WINDOW DEPO SAF0.5(DRM2) SAPPh: WINDOW DEPO SAF0.5(DRM2) SAPPHIRE
SHIELD, UP 300MM RING-Qrtz: RING,SHIELD UPPER,STRAIGHT
Insulator, ESC Enclosure (COC): Insulator, ESC Enclosure (COC) - Quartz
Cover Ring, 360- L (M) - Qrtz: Cover Ring, 360- L (M) - Quartz
RING, BTM SHIELD Y-AL, SE: RING, BTM SHIELD Y-AL, SE
PLATE,EXHAUST Y-AL, SE: PLATE,EXHAUST Y-AL, SE
SHUTTER,BTM TYPE Y-AL, SE: SHUTTER,DEPO Y-AL,LAB MIN
SHIELD,DEPO: SHIELD,DEPO LAB Y-AL SE 2
Focus Rg, 360-302-COC: Focus Rg, 360-302-COC
Insultr, lwr T32-R6-BL-NC: INSULATOR,LOWER T32-R6-BL-NC
WINDOW,DEPO CLP: WINDOW,DEPO CLP
SCREW PIN LOCK, Cerazol: SCREW,PIN,LOCK
Si Upper Electrode: Si Upper Electrode
CEL ASSY: CEL,OX T10-75-C912 (COC-N)
ESC ASSY: ESC ASSY、SCCM-OX L
Damage/Missing parts list
None reported, please inspect to reconfirm
Dry pumps and customer provided items not included on sales
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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