Tokyo Electron Ltd. Telius 305 SCCM

Equipment details:

Date of Manufacture: Jun 11, 2003

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taichung City, Taiwan

Available date: 4/30/2021

Tool config is based on original PO, please verify tool details at tool inspection

Tool is configed with 2 chambers

Standard Specifications

Software Revision: Linux 6.75 Rev 000-VSTD6.75a

Lot Stability Dummy SW: Software for running lot stability wafer.

OEE WPH Software: SW only for OEE throughput upgrade.

GEM SEC Revision: TBD

Wafer Size: Diameter 300+/- 0.20mm(SEMI M1.15), Notch

Carrier: FOUP (Comply with SEMI E47.1 (25wafers))

Inter Face: 3 carrier stage (Continuous flow operation) with Semi compliant MENV and FIMS assemblies

Online Connection: GEM / CIM GJG (Hardware Interface : Ethernet 100Base-Tx)

"Interface A: GEM/CIM GJG

Hardware interface : Ethernet 100Base-Tx"

Utility Box: Regulator : Air/AR2500(SMC), N2/SQ-420E(VERIFLO), He/SQMICRO(VERIFLO)

Utility Box: Manual Valve : OGD20V-6RM-K / OGD10V-4RM-K (CKD)

Utility Box: Pressure Gauge : Bourdon Gauge

Loader Mod Corrosion Prevent: SUS Parts, Ball screw & Liner guide : PTFE Coating

Load Lock Pressure Monitor: Pressure Switch : VSA100A (INFICON)

Load Lock Pressure Monitor: Pirani gauge : TTR211S LEYBOLD)

Load Lock Pressure Monitor: CM : 626A01TDE (MKS)

Maintenance Monitor: 2 (Flat Panel Display Touch Screen Type)

Water Leak Detector: 4 (LM;1, each PS;1)

Signal Tower: Red/Yellow/Green/ (Upper Left of Front x1 & Upper right section of loader on maintenance side x1)

Data Back up: MO drive

EMO: Front x1, Rear x3

Cable Length: 12m (Interconnection), 16m (Top RF cables),15m(Btm RF cables)

Inter Locks: External (When the I/L signal is received from Factory, gas valves are closed)

Fittings: Standard

Supporting Remote Units

"Chiller: Daikin UBRPD5B-2T2

* stopped production"

Coolant: Lower:FC3283, Upper:FC40

Chiller Hose: BRINE HOSE 12/11M

Handy Maintenance Controller: LCD DISPLAY UT3-TLN21-A

RF Generator TOP: AGA-50B2

RF Matcher TOP: AMN-50B2

RF Generator Bottom: WGA-50E

Matching Controller: WMN-50H6(2MHZ/5KW)(PS3)

Pen Record Box: 2L80-00212-12

Loader Module: SELME2112ZS22-AD5

LOAD PORT: SELOP12F25-30U-14

DRIVE UNIT: SBX92102928

READER OPTICAL: ISS-1700-1TELCC

Carrier ID Reader: KEYENCE BL-601 HAC1-SO

APC: 10 INCH (250MM)

Hardware Configuration

Proc Chbr 1,2: SCCM Oxide; Y203 Coating

Chamber hardware: FCC

Endpoint type: SE2000ii

ESC type: ELECTRODE BTM,H2 T4 12YG L

Focus ring: 3.4mm

Thunderwall He Gas Inlet: Ceramic Thunderwall with Ceramic pusher pins.

Polished focus ring: None

FC lower insulator: INSULATOR,LOWER (RE)

Magnet Shield: None

Oring for Chbr Body-Depos: Armorcrystal

CEL Body ASSY: Upper electrode constant temperature control

"TMP: FT-3301

(MITSUBISHI)"

TMP Back Pressure Monitor: 51A11TGA2BA003 (MKS)

Dry Pump: MU300(KASHIYAMA) Customer Supply

Final Valve, Heater: Valve; AGD21V-6RM-GWL4 (CKD)

Filter: Filter; CEP-TM_HL-VR-03PB (Toshiba Ceramic)

APC: 10 INCH (250MM)

Pressure Monitor: C/M (Process Monitor) : 627BRETDD2P (MKS), 45deg, 30Pa

Pressure Monitor: C/M (Self Check) : 627B11TDC2P (MKS), 45deg, 1330Pa

Pressure Monitor: B.A. Gauge (CM Calibration) : BPG400 (INFICON), 2.0x10-5 ~ 0.1Pa

Pressure Monitor: ATM Switch : 41B13DGA2AA040 (MKS)

Pressure Monitor: Pressure Switch : 51A11TGA2BA010 (MKS), H2/fluoro gas

Gas Box Configuration

Gas Line 1: Gasline-1 Ar FCSDN-4WS-798-F1600

Gas Line 2: Gasline-2 C4F6 FCSDN-WR-4WS-798-F122B

Gas Line 3: Gasline-3 C4F8 FCSDN-WR-4WS-798-F122B

Gas Line 4: Gasline-4 C5F8 FCSDN-WR-4WS-798-F115A

Gas Line 5: Gasline-4 C5F8 FCSDN-WR-4WS-798-F200A

Gas Line 6: Gasline-6 Xe FCSDN-WR-4WS-798-F1L

Gas Line 7: Gasline-7 O2 FCSDN-4WS-798-F65

Gas Line 8: Gasline-8 O2 FCSDN-4WS-798-F600

Gas Line 9: Gasline-9 CF4 FCSDN-4WS-798-F260

Gas Line 10: Gasline-10 CHF3 FCSDN-4WS-798-F260

Gas Line 11: Gasline-11 CH2F2 FCSDN-4WS-798-F80

Gas Line 12: CAP

Purge: N2 (Process Grade N2)

Filter: CNF1004USG4 (Nihon Pall)

"Regulator: SQMICRO (VERIFLO)

12-1A01IGS2W1.54"

Filter (N2): SQMICRO (VERIFLO)

Valve: Primary side(Utility-MFC):Mega mini (FUJIKIN)

Valve: Secondary side(MFC-PC):Mega one (FUJIKIN)

Piping: Dual Piping (for Gas leak containment, Gas box to Final valve & Exhaust through Gas box)

Gas Leak Detection Port: 5 Ports (6.35mm, Swagelok L-type)

Final Pressure Switch: 51A (MKS)

Pressure Gauge: Bourdon Gauge (with inside finishing)

Pressure Gauge: Bourdon Gauge (with inside finishing) 0.4MPa

SP3 Gas Line Connection: Single Line Drop

GBROR: GBROR

Process Kit Configuration

WINDOW, SHIELD DEPO(DRM2) QRTZ: WINDOW, SHIELD DEPO (DRM2) QUARTZ

WINDOW DEPO SAF0.5(DRM2) SAPPh: WINDOW DEPO SAF0.5(DRM2) SAPPHIRE

SHIELD, UP 300MM RING-Qrtz: RING,SHIELD UPPER,STRAIGHT

Insulator, ESC Enclosure (COC): Insulator, ESC Enclosure (COC) - Quartz

Cover Ring, 360- L (M) - Qrtz: Cover Ring, 360- L (M) - Quartz

RING, BTM SHIELD Y-AL, SE: RING, BTM SHIELD Y-AL, SE

PLATE,EXHAUST Y-AL, SE: PLATE,EXHAUST Y-AL, SE

SHUTTER,BTM TYPE Y-AL, SE: SHUTTER,DEPO Y-AL,LAB MIN

SHIELD,DEPO: SHIELD,DEPO LAB Y-AL SE 2

Focus Rg, 360-302-COC: Focus Rg, 360-302-COC

Insultr, lwr T32-R6-BL-NC: INSULATOR,LOWER T32-R6-BL-NC

WINDOW,DEPO CLP: WINDOW,DEPO CLP

SCREW PIN LOCK, Cerazol: SCREW,PIN,LOCK

Si Upper Electrode: Si Upper Electrode

CEL ASSY: CEL,OX T10-75-C912 (COC-N)

ESC ASSY: ESC ASSY、SCCM-OX L

Damage/Missing parts list

None reported, please inspect to reconfirm

Dry pumps and customer provided items not included on sales