Macquarie Semiconductor and Technology on behalf of Micron Memory Taiwan Co., Ltd. (F16)
Etch/Ash/Clean - Plasma Processing
Date of Manufacture: Jun 11, 2003
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Taichung City, Taiwan
Available date: Currently Available
| Software Version (include revision #) | Ver6.75-Rev000-VSTD6.75a | ||||
| System Power Rating | 200V AC 3-Phase | ||||
| Loading Configuration | 3 lots loading | ||||
| Vendor Chm Model | Chemicals / Gases Used | ||||
| Chm/Unit Position 1 | SCCM | Ar ,O2 ,CF4 ,CHF3 ,CH2F2 ,C4F6 ,C4F8 ,CO | |||
| Chm/Unit Position 2 | SCCM | Ar ,O2 ,CF4 ,CHF3 ,CH2F2 ,C4F6 ,C4F8 ,CO | |||
| Chm/Unit Position 3 | _______________________ | __________________________________ | |||
| Chm/Unit Position 4 | _______________________ | __________________________________ | |||
| Process Unit: | Model: | Remark | |||
| Chiller | Daikin UBRPD5B-2T2 * stopped production | ||||
| Coolant | Lower:FC3283, Upper:FC40 | ||||
| Proc Chbr 1,2 | SCCM Oxide; Y203 Coating | ||||
| ESC type | ESC ASSY,SCCM-OX L | ES3D87-052854-11 | |||
| Controller: | |||||
| RF Generator TOP | AGA-50B2 | ||||
| RF Matcher TOP | AMN-50B2 | ||||
| RF Generator Bottom | WGA-50E | ||||
| Matching Controller | WMN-50H6(2MHZ/5KW)(PS3) | ||||
| MFC/Pressure Unit: | |||||
| Pressure Monitor | C/M (Process Monitor) : 627BRETDD2P (MKS), 45deg, 30Pa | ||||
| Pressure Monitor | C/M (Self Check) : 627B11TDC2P (MKS), 45deg, 1330Pa | ||||
| Pressure Monitor | B.A. Gauge (CM Calibration) : BPG400 (INFICON), 2.0x10-5 ~ 0.1Pa | ||||
| Pressure Monitor | ATM Switch : 41B13DGA2AA040 (MKS) | ||||
| Pressure Monitor | Pressure Switch : 51A11TGA2BA010 (MKS), H2/fluoro gas | ||||
| Drive Mechanisms: | |||||
| FOUP Opener: | |||||
| Loader Module | SELME2112ZS22-AD5 | ||||
| LOAD PORT | SELOP12F25-30U-14 | ||||
| DRIVE UNIT | SBX92102928 | ||||
| READER OPTICAL | ISS-1700-1TELCC | ||||
| Carrier ID Reader | KEYENCE BL-601 HAC1-SO | ||||
| Gas System: | |||||
| Final Pressure Switch | 51A (MKS) | ||||
| Valve | Primary side(Utility-MFC):Mega mini (FUJIKIN) | ||||
| Valve | Secondary side(MFC-PC):Mega one (FUJIKIN) | ||||
| FCS | FCSDN-4WS-798 | ||||
| Exhuast System: | |||||
| TMP | FT-3301 (MITSUBISHI) | ||||
| TMP Back Pressure Monitor | 51A11TGA2BA003 (MKS) | ||||
| Dry Pump | MU300(KASHIYAMA) Customer Supply | ||||
| Final Valve, Heater | Valve; AGD21V-6RM-GWL4 (CKD) | ||||
| Filter | Filter; CEP-TM_HL-VR-03PB (Toshiba Ceramic) | ||||
| APC | 10 INCH (250MM) | ||||
| EMO | Front x1, Rear x3 | ||||
| Signal Tower | Red/Yellow/Green/ (Upper Left of Front x1 & Upper right section of loader on maintenance side x1) | ||||
| Cable Length | 12m (Interconnection), 16m (Top RF cables),15m(Btm RF cables) | ||||
| Coolant | Lower:FC3283, Upper:FC40 | ||||
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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