Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)

Applied Materials (AMAT) Reflexion LK Copper

Asset ID: 8213

Print spec sheet

Applied Materials (AMAT)

Reflexion LK Copper

Copper CMP

CMP Equipment

Equipment details:

Date of Manufacture: 2006

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan, Taiwan

Available date: 6/10/2022

Process: CUCMP

Base System
Reflexion LK: 4 head, 3 platen polishing system. Dry in Dry out.
Polisher Skins : Dark P1, P2, P3, and P4: 4910 compliant.
Gap Wash: 120 degree nozzles
Load Cup Wafer Exchanger: Enhanced counter balance springs
Nova 3090 Ready: None
Monitor 1 Location : Cart
Monitor 2 Location : Ergo Arm type
Light Tower: Factory Interface and Polisher Sides

Software
LK Software: lp3B4.5_29
Factory Interface : fb4.9_14 Beta
ISRM / RTPC: isB3.0_10
RTPC: B3.0_11

Platen 1
Platen Type : STANDARD (<= 200 RPM)
Endpoint : RTPC
Endpoint: N/A
High Pressure Rinse Flow Meter : 1350-00195 (4.6 l/min)F LOW METER ASSY 1/2OD 1.6-20LPM PFA
Rinse Arms: High Pressure/Flow
Flow Meter : 50-500 ml/min
Temperature Control: P laten Cooling Water

Platen 2
Platen Type : STANDARD (<= 200 RPM)
Endpoint : Full Scan Optical ISRM
Endpoint: N/A
High Pressure Rinse Flow Meter : 1350-00195(4.6 l/min)F LOW METER ASSY 1/2OD 1.6-20LPM PFA
Rinse Arms: High Pressure/Flow
Flow Meter : 50-500 ml/min
Temperature Control: P laten Cooling Water

Platen 3
Platen Type: STANDARD (<= 200 RPM)
Endpoint : Full Scan Optical ISRM
Endpoint: N/A
High Pressure Rinse Flow Meter : 1350-00195(4.6 l/min) F LOW METER ASSY 1/2OD 1.6-20LPM PFA
Rinse Arms: High Pressure/Flow
Flow Meter : 50-500 ml/min
Temperature Contro: l Platen Cooling Water

Polisher
Polisher Technology : SLURRY AND PAD
Polishing Head: CONTOUR GEN III (0.5 TO 5.0 PSI)
Cross Break: N/A
Pad Wafer Loss Sensor: DARK PAD SENSOR
InterPlaten Clean : No
ISRM Laser Key Switch: Y es
Slurry Delivery System : 4 x 12 CLC SDS
Head 1 Power Cable : 0150-16277 CABLE ASSY, HR1, DRIVER-MOTOR POWER, REF
Head 2 Power Cable : 0150-16278 CABLE ASSY, HR2, DRIVER-MOTOR POWER, REF
Head 3 Power Cable : 0150-16279 CABLE ASSY, HR3, DRIVER-MOTOR POWER, REF
Head 4 Power Cable : 0150-16280 CABLE ASSY, HR4, DRIVER-MOTOR POWER, REF
Head 1 Encoder Cable: 0150-16281C ABLE ASSY, 300MM, HR1, DRIVER-RESOLVER
Head 2 Encoder Cable: 0150-16282C ABLE ASSY, 300MM, HR2, DRIVER-RESOLVER
Head 3 Encoder Cable: 0150-16283C ABLE ASSY, 300MM, HR3, DRIVER-RESOLVER
Head 4 Encoder Cable: 0150-16284C ABLE ASSY, 300MM, HR4, DRIVER-RESOLVER
G4+ UPA : MKS UPA
G4+ UPA : SMC UPA

Cleaner Meg
Chemical 1:C LC 1-250 ml/min
Chemical 2:C LC 1-250 ml/min

Brush Box 1
Chemical 1 : 0-1250ml/min
Chemical 2 : 0-1250ml/min

Brush box 2
Brush LDM Type: TwoChemInLineMixed
Chemical 1 : 0-1250ml/min
Chemical 2 : 0-1250ml/min

Dryer Module
Dryer Type :VAPOR DRYER
Recovery Module: N /A
Output Station Dampner: Cap is Viton

Missing/Damaged Parts List
None report, please inspect tool to reconfirm

Enquire about this product

I agree to receive further communication from Macquarie Group Limited in accordance with its Privacy Policy, as amended from time to time.

The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


Related products

No results message:
Displayed when filters returns no results.

We couldn't find any items that match your criteria.

Please try a different keyword.

Service unavailable:
Displayed when filter service cannot be reached.

Sorry, this service is currently unavailable.

Please try again later.

Get in touch

Have a question for our team?

Ask about our equipment solutions, ranging from Macquarie equipment inventory sales, sourcing programs, surplus disposition options, and direct equipment purchases.

I agree to receive further communication from Macquarie Group Limited in accordance with its Privacy Policy, as amended from time to time.