Macquarie Equipment Trading on behalf of Micron Memory Japan, G.K. (F15)
Date of Manufacture: 2011
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Hiroshima, Japan
Available date: Currently Available
Tool has been de-installed and is stored in an off-site warehouse.
Shipping brackets and kits will need to be supplied by buyer.
A HARD DISK DRIVE WILL BE REMOVED FROM TOOL.
High resolution wafer inspection system
DUV laser class 4 laser
Wave length 266nm Power 230mW
NA = 0.9
Zygo laser class 2 laser
Wave length 632nm Power 1mW
Gas = Natrogen 80-100 psi Purity 99.999%
Bright field, Gray field
Stage = XY axis . Theta-Z . Z
Other Missing or damaged parts: Not reported.
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