Macquarie Semiconductor and Technology on behalf of Micron Memory Taiwan Co., Ltd. (F16)
Date of Manufacture:
Currently Configured for: N/A
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Taichung City, Taiwan
Available date: Currently Available
| Excess items | Vendor | Model | Qty |
| Abatement | UNISEM | UN2002A-PGS | 8 |
| Abatement | UNISEM | UN2002A-PGD | 1 |
| Abatement | UNISEM | UN2004A-PGS | 3 |
| Area | Vendor | Type | Model | overhaul | S/N | Bonded No. | Fixed Asset No. | location |
| FST | UNISEM | abatement | UN2002A-PG | done PM | U07JP-SLA-383A | N/A | N/A | A1-1F |
| FST | UNISEM | abatement | UN2002A-PG | done PM | U07JP-SLA-389A | N/A | N/A | A1-1F |
| FST | UNISEM | abatement | UN2002A-PG | done PM | U07DP-SLA-222A | N/A | N/A | A1-1F |
| FST | UNISEM | abatement | UN2002A-PG | done PM | U07BP-SLA-078A | N/A | N/A | A1-1F |
| FST | UNISEM | abatement | UN2002A-PG | done PM | U07DP-SLA-225A | N/A | N/A | A1-1F |
| FST | UNISEM | abatement | UN2002A-PG | done PM | U07BP-SLA-077A | N/A | N/A | A1-1F |
| FST | UNISEM | abatement | UN2002A-PG | done PM | U07BP-SLA-063A | N/A | N/A | A1-1F |
| FST | UNISEM | abatement | UN2002A-PG | done PM | U07BP-SLA-080A | N/A | N/A | A1-1F |
| FST | UNISEM | abatement | UN2004A-PGD | done PM | U14DP-SMA-143A | N/A | N/A | A1-1F |
| FST | UNISEM | abatement | UN2004A-PGS | done PM | U14DP-SMA-144A | N/A | N/A | A1-1F |
| FST | UNISEM | abatement | UN2004A-PGS | done PM | U14EP-SMA-155A | N/A | N/A | A1-1F |
| FST | UNISEM | abatement | UN2004A-PGS | done PM | U14JP-SMA-397A | N/A | N/A | A1-1F |
System Features
1. Type : Fuel (LNG, LPG, H2) Burn -Wet
2. High abatement efficiency for PFC gases (99%)
3. Minimizing moisture vapor exhaust (Apply dry system)
4. Excellent safety interlock system
5. Relatively lower operation cost
6. Simple operation and easy maintenance
7. High corrosion resistance structure
8. CE-Mark & SEMI-S2 certified
Target abatement gas
1. PFCs : NF3, C2F6, SF6, CF4, C3F8, etc
2. Flammable gases : SiH4, PH3, TEOS, H2, DCS, etc
3. Water soluble gases : Cl2, HCl, HF, NH3, etc
Item | Specification | Remark | ||
| NECA | UN2004A-PGS | UN2004A-PGS | ||
Dimension(mm) | 600x900x1600 (WxDxH) | 900x800x1800 (WxDxH) | 1250x1000x1880 (WxDxH) | |
| Flame Temperature(°c) | 1200~1600°c | 1200~1600°c | 1200~1600°c | |
| Capacity | 300LPM | 300LPM | 600LPM | Except Scrubber Utility |
| Electric Power | Single Phase, 208V, 30A | Single Phase, 208V, 30A | Single Phase, 208V, 30A | |
| Weight | 350kg | 500kg | 800kg | |
| Inlet Port | NW40 x 4port(Standard) | NW40 x 4port(Standard) | NW40 x 6port(Standard) | User Option |
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
Get in touch
Ask about our equipment solutions, ranging from Macquarie equipment inventory sales, sourcing programs, surplus disposition options, and direct equipment purchases.
