Macquarie Semiconductor and Technology on behalf of Micron Memory Taiwan Co., Ltd. (F16)

Unisem UN-2002A-PG

Asset ID: 209437

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Abatement - Scrubber

Support Equipment (Fab)

Equipment details:

Date of Manufacture:

Currently Configured for: N/A

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taichung City, Taiwan

Available date: Currently Available

Excess itemsVendorModelQty

AreaVendorTypeModeloverhaulS/NBonded No.Fixed Asset No.location
FSTUNISEMabatementUN2002A-PGdone PMU07JP-SLA-383AN/AN/AA1-1F
FSTUNISEMabatementUN2002A-PGdone PMU07JP-SLA-389AN/AN/AA1-1F
FSTUNISEMabatementUN2002A-PGdone PMU07DP-SLA-222AN/AN/AA1-1F
FSTUNISEMabatementUN2002A-PGdone PMU07BP-SLA-078AN/AN/AA1-1F
FSTUNISEMabatementUN2002A-PGdone PMU07DP-SLA-225AN/AN/AA1-1F
FSTUNISEMabatementUN2002A-PGdone PMU07BP-SLA-077AN/AN/AA1-1F
FSTUNISEMabatementUN2002A-PGdone PMU07BP-SLA-063AN/AN/AA1-1F
FSTUNISEMabatementUN2002A-PGdone PMU07BP-SLA-080AN/AN/AA1-1F
FSTUNISEMabatementUN2004A-PGDdone PMU14DP-SMA-143AN/AN/AA1-1F
FSTUNISEMabatementUN2004A-PGSdone PMU14DP-SMA-144AN/AN/AA1-1F
FSTUNISEMabatementUN2004A-PGSdone PMU14EP-SMA-155AN/AN/AA1-1F
FSTUNISEMabatementUN2004A-PGSdone PMU14JP-SMA-397AN/AN/AA1-1F

System Features

1. Type : Fuel (LNG, LPG, H2) Burn -Wet

2. High abatement efficiency for PFC gases (99%)

3. Minimizing moisture vapor exhaust (Apply dry system)

4. Excellent safety interlock system

5. Relatively lower operation cost

6. Simple operation and easy maintenance

7. High corrosion resistance structure

8. CE-Mark & SEMI-S2 certified

Target abatement gas

1. PFCs : NF3, C2F6, SF6, CF4, C3F8, etc

2. Flammable gases : SiH4, PH3, TEOS, H2, DCS, etc

3. Water soluble gases : Cl2, HCl, HF, NH3, etc





600x900x1600 (WxDxH)

900x800x1800 (WxDxH)1250x1000x1880 (WxDxH)
Flame Temperature(°c)1200~1600°c1200~1600°c1200~1600°c
Capacity300LPM300LPM600LPMExcept Scrubber Utility
Electric PowerSingle Phase, 208V, 30ASingle Phase, 208V, 30ASingle Phase, 208V, 30A
Inlet PortNW40 x 4port(Standard)NW40 x 4port(Standard)NW40 x 6port(Standard)User Option

Product images

The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.

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