Macquarie Semiconductor and Technology on behalf of Macquarie Electronics USA Inc.

VON ARDENNE XEA NOVA

Asset ID: 208608

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VON ARDENNE

XEA NOVA

Coating Equipment

Deposition Equipment

Equipment details:

Date of Manufacture:

Currently Configured for: To be determined

Current Equipment Status: Available

Location of Equipment: United States

Available date: Currently Available

N-LINE GLASS COATING SYSTEM

Located in Clean room

Including 12 Sputter sections & towing, Transport Cabinet, Chiller & Pump, Power System, ITO Clamps...etc


Inspect to confirm configuration and condition.


XEA|nova 5.5 WAFER COATING SYSTEM 

TECHNICAL DATA

Subject to change without notice due to technical improvement.

GENERAL FEATURES

Throughput ≤ 5500 substrates/hour for M6 wafers

Substrates silicon wafers, metal plates, polymer films, others

Substrate size all common formats: M2, M4, M6, M10 and M12

Substrate thickness ≤ 3 mm

Coating area on carrier ≈ (1 x 1.7) m2 , e.g. (6 x 9) for M6 wafers

SPUTTERING SYSTEM

Magnetron type single or dual rotatable

Sputter arrangement sputter up and sputter down

Deposition type DC, pulsed DC, AC

Number of independent process unlimited

Gases and media e.g. Ar, O2 , N2 , H2 O, X

Target utilization > 80 %, depending on process & material

OPTIONAL PROCESS FEATURES

Substrate heating

Pre-treatment (e.g. Ion etching …)

Alternative deposition technologies upon request

OPTIONAL FEATURES

Automated substrate loading & unloading

Automated carrier return system

Controlled heating and cooling unit (CHU)

Dry air supply (CDA)

Carrier storage racks

Others on request

AUTOMATION OPTIONS

Configuration single- or double-end

Automation system fully automatic

Substrate feeding cassette, box, other 

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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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