Macquarie Equipment Trading on behalf of Micron Technology Taiwan, Inc. (F11)

Tokyo Electron Ltd. TELINDY Plus ALD High-K

Asset ID: 7209

Print spec sheet

Tokyo Electron Ltd.

TELINDY Plus ALD High-K

Vertical Furnace

Furnaces/Diffusion Systems

Equipment details:

Date of Manufacture: 2010

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan City, Taiwan

Available date: Currently Available

Process: ALDZROX


Original PO Configuration. Audit to verify


2.2- General Specification

Safety Specification:S2-0706/CE

Heater Model: Low-Temp VMM-56-201 4zone/150-600C without RCU

Process Condition: LP

Process Temperature (C):300C

ART Control:None

N2 Load Lock:Yes

Wafer Type: 300mm-Si SEMI STD-Notch

Qty. of Production Wafers: 100wfr

Boat Operation: 2 Boat Type / 2 Boat Operation (B/S)

Software Version (WAVES): Ver. 6.07


3.1.1- Furnace Spec, Furnace

Dewpoint Meter for N2 LL: None

Loading Area Light: White (LED)

RCU Duct Length FNC - RCU: None

Ionizer (maker/model): None

Chemical PreFilter-Acid:None

Chemical PreFilter-Alkali: None

Chemical PreFilter-Hydrocarb: Yes

Chemical PreFilter-Location: Side FFU

Side Maintenance: None

O2 Density Control for N2 LL: Yes

O2 ANALYZER Maker: NGK, Model: SH-304 STANDARD

N2 Boat Shower Wafer Cooling: Yes

Furnace Temperature Controller: Model 560A


3.1.2- Furnace Spec, Wafer/Carrier Handling

Carrier Type: FOUP/25slots, SEMI STD

FOUP Maker/Model: Entegris/Spectra

Carrier Stage Capacity: 18 FOUP

Info Pad A,B: Pin

Info Pad C,D: Pin

Fork Material: Al2O3+PEEK

W/T Type: 1+4 Edge Grip

W/T Type A/T: None


3.1.3- Furnace Spec, Furnace Facilities

Furnace Exhaust Connection Poi: Top Connection

Cooling Water Connection Point:Bottom Connection

RCU DUCT Connection Point:N/A


3.2.1- Gas Spec, Gas Distribution System

IGS Type: IGS 1.125"W-seal rail-mount      

IGS Maker:Fujikin   

Tubing Bends:Bend (Less than 90deg)            

IGS Final Filter:PALL            

IGS Regulator: CKD            

IGS MFC (Maker/Type):AE / Digital      

Water Vapor Generator(WVG):N/A         

IGS Press. Transducer: NAGANO         

Liquid Source Delivery- 3DMASi: AS-102S-B5/3DMASi 300sccm MCAC./ADVANCED ENERGY

Auto Refill System- 3DMASi:Customer Provided - Bulk 3DMASi delivery system CG325/CG400 GEN II or CG325 GEN II   Scumacher-Chemguard

Auto Refill System Provider: Provided by customer            

Refill System Tubing interconn: Provided by customer            

Ozone Delivery System (Maker/M:"Maker: MKS

Model: AX 8575-29"      

Ozone Delivery System: Provider   customer      0      

Liquid Source Delivery- Zr:Onboard Zr bubbler, ergonomic version      

Liquid Source Delivery- X precursor: Onboard Ti bubbler, ergonomic version      

Liquid Source Delivery- TMA: Onboard TMA bubbler, ergonomic version      

HTR9.1,FLAT,AMPOULE,0DP0: Insulation, Ampoule, Top/9399-0975/MKS

HTR,INS,NBV,MAN KNOB:Insulation, Valve Knob,9599-0665/MKS

HTR2.5,STR6.21,SPEC,1EP0:Insulation, bypass,9525-0060/MKS

HTR2.0,STR5.5,SPEC,1EP0:Insulation, outlet,9520-0839/MKS

HTR2.0,STR5.5,SPEC,1EP0:Insulation, inlet,9520-0840/MKS

Wrap around valve heater (MKS):Valves heated by wrap around heaters supplied by Supplier      


3.2.2- Gas Spec, Gas Facilities

Wrap around ampoule heater (GL:   Ampoule heated by wrap around heaters supplied by Supplier   

Incoming Gas Connection Point: Bottom Connection OPT: Ordering Fab must verify facility requirements and note any special requirements within the PO.

Gas VENT Connection Point: Bottom Connection OPT: Ordering Fab must verify facility requirements and note any special requirements within the PO.

Exhaust VENT Connection Point: Bottom Connection OPT: Ordering Fab must verify facility requirements and note any special requirements within the PO.

Gas Unit Exh Connection Point: Top Connection   

Process Gas Exhaust Connection   Bottom Connection: OPT: Ordering Fab must verify facility requirements and note any special requirements within the PO.


3.3.1- Exhaust Specification

Exhaust Pressure Control (AP): N/A

Exhaust Pressure Controller (A: N/A

Vacuum Exhaust System: 3inch Pipe

Trap: N/A

Vacuum Pressure Controller: CKD-VEC

Burn Out Unit: None


3.3.1- Exhaust Specificationbution

Vacuum Gage - Press Ctrl: MKS (Hot) Capacitance Manometer   

Vacuum Gage - Press Monitor (1: MKS (Hot) Capacitance Manometer   

Vacuum Gage - Pump Monitor:MKS (Hot) Capacitance Manometer   

Main Valve: CKD-Hi-Speed VEC   

Pump Maker/Model: EDWARDS/IXH1820, OPT: Pump is customer Provided. Ordering Fab must verify pump is purchased for all process chambers.

Pump Provided by: Provided by customer   

Abatement System Type: Burning Type   Abatement maybe different based on Fab specification.

Abatement System (Maker/Model): Orient service Co.,Ltd / GDO1862-WA   Abatement maybe different based on Fab specification.

Abatement System Provider: Customer   

N2 Dilution Unit Provided by: Customer   

Pump Power: Customer   

Pump Control Unit Setting Loca: Power Box Top   

Pump-FNC Vacuum Piping Provide: Customer   


3.4.1- Reactor Specification

Quartz Provided by: Optional, OPT: Ordering Fab must verify if Supplier is to provide, if so QTY= 1. If Customer to provide then set QTY=0, Default = 0 note any special requirements within the PO.

Quartz Vendor Requirement: Must be Customer qualified supplier   

SiC Provided by:N/A   

SiC Vendor Requirement: N/A   

Liner Tube (AP):N/A   

Process Tube (AP, AP+Sub-AP):N/A   

Outer/Inner Tube Material: Quartz / Quartz   

Inner Tube Type (LP): Cross-flow inner tube Type with narrow slit and wider pitch tab is used (slit size 1007 mm)   

Inner T/C: Outer Tube interior wall type (for CVD)   

Tube Sealing: O-Ring   

Manifold Heater: Yes   

Switch Valve for Manifold Cool: Yes   

Soft Backfill Injector: Yes   

Boat Type: 117 slots Ladder (8mm pitch)   

Boat Material: Quartz   

Boat Rotation: Yes   

Pedestal Type: Quartz   

Cap Heater:Yes   

Auto Shutter: No Shutter Purge Type   

Earthquake Countermeasure: Yes,OPT: Ordering Fab must verify seismic requirements and note any special requirements within the PO.



3.5.1- Power Specification, Power dist System

Voltage 3phase: 480VAC

3phase connection type: Star Connection

Voltage Single-phase: 120VAC

Single-phase connection type: Grounded

Frequency: 60Hz 

Wattmeter: None

Control Power UPS provided by: Optional

Control Power UPS type:   Fab-wide system

UPS Input/Output Voltage:N/A


3.5.2- Power Specification, Cable Length

Power Cable Input Entrance Loc: Power Box Top

FNC - Power Box:20m

Power Box - RCU: N/A

Power Box - Pump Unit:20m

Power Box -Refill System (if u: 20m

Power Box - WVG CTRL Unit (if: N/A

FNC - WVG CTRL Unit (if used): N/A

Power Box -Scrubber System (if: N/A

Power Box - Ozone Delivery sys: 30m

Power Box - UPS (if used):N/A

Wiring by: Customer

Conduit/Raceways provided by:Customer


3.6.1- Interface Specification, Factory Automation System

Host Communications: Comply with GJG   

Equipment Host I/F Connection:Gas Box TOP HSMS (10Base-T/100Base-TX), OPT: Ordering Fab to verify connection point as follows: QTY=1 is Bottom connection, QTY=2 is Top connection, Default = 1, and note any special requirements within the PO.

Ingenio:Yes, OPT: Ordering Fab must specify Ingenio included or not, default is Yes (QTY=1). Set QTY=0 if excluded

Group Controller Connection: Yes   

OHT Capability: Yes   

AGV Capability: None   

RGV Capability: None   

PGV Capability: None   

Load Port Operation: Upper   

PIO I/F Location: FNC Top   

PIO Provided by:TEL   

PIO Maker/Model: HOKUYO / DMS-HB1-Z series(Head-On)   

Carrier ID Reader Writer Type: RF   

CIDRW Lower Load Port: Read   

CIDRW Upper Load Port: Read   

CIDRW FIMS: Read/ Write,OPT: Ordering Fab must verify if Write or Read Write. Write only QTY= 1.Read/Write QTY= 2. Default = 1 . Note any special requirements within the PO.

CIDRW Maker/Model:"Controller is V700-L22-6.

ID READER(HEAD) is V640-HAM11-V2.

ANTENNA is V640-HS61."   

CIDRW Provided by: TEL   

EEC (Equipment Engineering Cap:   FDC(Fault Detection and Classification)   "OPT: Ordering Fab must specify if FDC is included or not, Include = QTY=1, Set QTY= 0 if excluded.

Default = 1"

Customized Management Signals: PT / WATER   

"INTERFACE PT/WATER: Interface A Option   "OPT: Ordering Fab must specify Interface A included or not, Include = QTY=1, Set QTY= 0 if excluded.

Default = 0"


3.6.2- Interface Specification, User Interface

Signal Tower Model: LOUGWB-24-4,OPT: Ordering Fab to verify VAC signal tower as follows: QTY=1 is LOUGWB-24-4, QTY=2 is LOUGWB-24-3, Defualt = 1 and note any special requirements within the PO.

Signal Tower Colors: Red/Yellow/Green/Blue, OPT: Ordering Fab to verify signal tower as follows: QTY=1 is Red/Yellow/Green/Blue , QTY=2 is Red/Yellow/Green, Defualt = 1 and note any special requirements within the PO.

Signal Tower Location: Front   

Front Operation Panel: Yes   

MMI and Gas FlowChart: Gas Box & Front Operation Panel Installed   

Indicator Type: Superset   

Operator Switch: Operator Access/Orange (STD)   

Pressure Display Unit: MPa / Torr   

Cabinet Exh Pressure Display: Pa   

Warning Label: English   


3.7.1- Other Specification, Unit Location

Furnace (Exh/Box,Gas/Box inclu:Main-Fab

Power Box:Sub-Fab

Pump:Sub-Fab

RCU:N/A

Step Up Transformer:N/A

Step Down Transformer:N/A

Ozone Delivery System:Sub-Fab

WVG Controller:N/A

Auto-Refill System:Sub-Fab

UPS:None


3.7.2 - Other Specification, Gas Leak Detector

Condenser:N/A

Gas Leak Detector:YES

Gas Leak Detector Provided By:TEL

Gas Leak Detector Maker:RiKen / GD-K77D-A

Gas Detector Power:Power is provided by Machine

Detected Gas 1 / Location:Optional

Detected Gas 2 / Location:N/A

Detected Gas 3 / Location:N/A

Detected Gas 4 / Location:N/A

Detected Gas 5 / Location:N/A

Detected Gas 6 / Location:N/A

Detected Gas 7 / Location:N/A

Furnace Detection Port:4 points (2 pairs)

Gas Box Detection Port:4 points (2 pairs)


4.0.1- Fixture List, Furnace

Tube Cart: 1 per 4 tools recommended

BACKDOOR REMOVAL FIXTURE:1 per 4 tools recommended

HEATER SET FIXTURE FIXTURE (SL:   3 per fab recommended

HEATER SET FIXTURE (RACK):3 per fab recommended

Mylar floor cutout template: Supplier to deliver 10 weeks prior to ODD


4.0.2- Fixture List, Auto Mechanism

FOUP DOOR OPENER ADJUSTMENT FI:   1 per 4 tools recommended

FIMS DOOR REMOVER:1 per 4 tools recommended

C/S TEACHING FIXTURE: 1 per 4 tools recommended

FORK GAUGE:1 per 4 tools recommended

FORK CLEARANCE CONFIRMATION FI:   1 per tool

BOAT ALIGNMENT FIXTURE (B/S):1 per 4 tools recommended - (Load Port Foup Teaching Fixture)


4.0.3 - Fixture List, Gas

IGS maintenance Jig: 1 per 4 tools recommended


4.0.4 - Fixture List, Interface Tool

HCT:HCT (Robot Cal. Terminal, Grip SW)= 1 per tool recommended

INTERCOM (INTERPHONE): 1 per 4 tools recommended


4.04 - Fixture List Reactor

INNER TUBE SET FIXTURE:1 per 4 tools recommended

Outer Tube Set Fixture: 1 per 4 tools recommended

SINGLE T/C: 1 per 4 tools recommended

PROTECTION TUBE FOR SINGLE T/C: 1 per 4 tools recommended

EXTENSION CABLE FOR SINGLE T/C: 1 per 4 tools recommended

AUTO PROFILE T/C: 1 per 4 tools recommended

PROTECTION TUBE FOR AUTO PROFI: 1 per 4 tools recommended

EXTENSION CABLE FOR AUTO PROFI: 1 per 4 tools recommended

TEMP MEASUREMENT FIXTURE (T/C: 1 per 4 tools recommended


Damage/Missing parts list

None reported, please inspect tool to reconfirm







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